R
Ron Naftali
Researcher at Applied Materials
Publications - 34
Citations - 430
Ron Naftali is an academic researcher from Applied Materials. The author has contributed to research in topics: Lens (optics) & Detector. The author has an hindex of 12, co-authored 34 publications receiving 430 citations.
Papers
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Patent
Illumination system for optical inspection
TL;DR: In this article, the transverse modes of the input beam are optically mixed so as to generate an output beam with a second speckle contrast, which is substantially less than the first contrast.
Patent
Wafer defect detection system with traveling lens multi-beam scanner
TL;DR: In this paper, a traveling lens acousto-optic device has been used to generate flying spot beams at the respective focus of each of the generated traveling lenses in the active region.
Patent
Focus error correction method and apparatus
TL;DR: In this paper, an illumination unit, a focusing optics and a focus detection unit are presented for maintaining a desired position of an article in a scanning system, where the illumination unit generates an incident light beam for illuminating an elongated region of the article and producing light returned from the illuminated region.
Patent
Optical inspection method and apparatus utilizing a variable angle design
TL;DR: In this article, a method and apparatus for optical inspection of an article is presented, which consists of an illumination unit and at least one detection unit, and the illumination unit generates an incident beam and directs it onto a predetermined region of the article.
Patent
Method and system for detecting defects
Boris Goldberg,Ron Naftali +1 more
TL;DR: In this article, a system for scanning a surface, comprising a light source producing an illuminating light beam, an objective lens assembly, located between the light source and the surface, a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between a light sensor and the objective lens, and at least one light detector, wherein at least a portion of a reflected light beam was detected from the surface and received from the selected telescope.