R
Ronald E. Dornseif
Publications - 2
Citations - 189
Ronald E. Dornseif is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Dielectric. The author has an hindex of 1, co-authored 2 publications receiving 189 citations.
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Interlayer dielectric process
TL;DR: In this article, a method for producing a film over a topologically non-planar surface of a material which has a sputter etch rate which is higher in a direction parallel to the plane of the wafer than in an opposite direction perpendicular to the surface, is presented.