S
S. R. Wilson
Researcher at University of New Mexico
Publications - 18
Citations - 483
S. R. Wilson is an academic researcher from University of New Mexico. The author has contributed to research in topics: Ion beam & Thin film. The author has an hindex of 9, co-authored 18 publications receiving 471 citations. Previous affiliations of S. R. Wilson include Bio-Rad Laboratories.
Papers
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Journal ArticleDOI
Ion-assisted deposition of optical thin films: low energy vs high energy bombardment
TL;DR: It is shown that both low and high energy ion bombardment improve SiO2 film stoichiometry, although slightly greater improvement is realized for the low energy case.
Patent
Lens scatterometer system employing source light beam scanning means
TL;DR: In this paper, an optical scatterometer system enables illumination of a sample material at various angles of incidence without rotating or otherwise moving the sample material, which is called optical scatterometry.
Proceedings ArticleDOI
Surface Figuring Using Neutral Ion Beams
TL;DR: In this paper, a broad-beam ion source was used for optical figuring, where the ion beam produced by a Kaufman ion source consists of a number of ions traveling in a (typi-cally) slightly diverging beam, along with an equal flux of lower energy electrons.
Patent
Method and apparatus for ion etching and deposition
John R. McNeil,S. R. Wilson +1 more
TL;DR: In this paper, a method and apparatus using ion etching and ion assisted deposition to reform a surface of an object, such as a large lens, from its existing topography to a predetermined topography is described.
Journal ArticleDOI
Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques
TL;DR: The theory and measurement of angle-resolved scatter are described and values of rms roughness are compared with values that were obtained by using a total integrated scatter measuring instrument, an optical profiler, and a mechanical profiler.