Described is a surface analysis method for analyzing energy of particles such as photoelectrons which are emitted from a sample surface by the irradiation of light with wavelengths ranging from the soft x-ray region to the vacuum ultraviolet region using an optical system including a reflective optical element to the sample surface so as to obtain chemical state information about the sample surface, wherein the beam diameter of the light on the sample surface is reduced to 1 μm or less in terms of full width at half maximum of the beam intensity profile on the sample surface so that the chemical state information about the sample surface can be obtained with high sensitivity and high resolution, and an apparatus for implementing this method.

Surface analysis method and apparatus

For producing phase-contrast images with a microscope which scans the object point-by-point with a beam of illuminating radiation, the illuminating radiation is focused by an objective (31, 32) including a phase-shifting element (33) of preselective geometry. A radiation-sensitive detector (36) is positioned directly behind the object plane (34), seen in the direction of the light; and the shape of the radiation-sensitive area of the detector is adapted to encompass the path of the radiation passing through the geometry of the phase-shifting element (33) of the objective (31, 32), e.g., where the phase-shifting elements (33) comprise an annular aperture, an appropriately conforming annular diaphragm (35) is arranged in front of the detector (36). The advantage of this arrangement is that it does not use any radiation-collecting lens system between the object plane (34) and the detector (36).

Method and device for producing phase-contrast images

A radiation condenser system for an X-ray microscope allows for the efficient collection and relay of radiation from a source to the sample. It generates a converging hollow cone of radiation that can be used in the imaging of a sample or target using a zone plate lens. This system comprises a capillary tube for receiving and focusing radiation onto a sample. A center stop is provided for blocking radiation being transmitted along an axis of the capillary tube.

X-ray microscope capillary condenser system

A Schwarzschild optical system comprising a concave mirror having an opening formed at the center thereof and a convex mirror arranged in opposite to the opening of the concave mirror, and has a numerical aperture of at least 0.25 on the object side, the concave mirror being formed to have an aspherical surface. This Schwarzschild optical system has a relatively large numerical aperture, a relatively large departure between the centers of curvature of the concave mirror and the convex mirror, and favorably corrected aberrations.

Schwarzschild optical system

The inventive X-ray microscope comprises an extended X-ray source, a unit for placing a studied object (3), a recording unit and an X-ray capillary lens disposed therebetween. The channels of said lens are divergent in the direction of the recording unit. The unit for placing the studied object is disposed between the extended X-ray source and the smallest end of the X-ray capillary lens. The inventive device is characterised in that the walls of the channels (14, 16) for transmitting radiation are coated with or made of a material which absorbs or scatters X-ray radiation, and are shaped in the form of the lateral surface of a frustum of cone or pyramid, or of a truncated cylinder or prism. Said material excludes the effect of total external reflection. The straightness of the longitudinal axes of the channels makes it possible to use said channels as collimators. The resolution capability totally depends on technological capabilities to reduce the input size of the channels. The use of the extended X-ray source makes it possible to significantly reduce the time of exposure and the power of an X-ray tube.

X-ray microscope

PURPOSE:To provide an X-ray optical system device of high resolution and high magnification by providing an oblique incident reflecting type optical member for magnifying the X-ray image of a sample, and a zone plate for further magnifying an intermediate image formed by this optical member. CONSTITUTION:An X-ray microscope is provided with an X-ray magnifying optical system formed of an oblique incident reflecting mirror 4 and a zone plate 5. X-rays emitted from an X-ray source 1 is converged on a sample 3 by a lighting optical system 2, and the X-ray image of the sample 3 is magnified by the oblique incident reflecting mirror 4. An intermediate image magnified by the oblique incident reflecting mirror 4 is further magnified by the zone plate 5 and picked up by an image pickup device 6. As the lighting optical system 2, it is desirable to use the one matching the number-of-openings of the oblique incident reflecting mirror 4 of the magnifying optical system.

Sadao Aoki

Papers

X-ray optical system