A laser imaging system is used to analyze defects on semiconductor wafers that have been detected by patterned wafer defect detecting systems (wafer scanners). The laser imaging system replaces optical microscope review stations now utilized in the semiconductor fab environment to examine detected optical anomalies that may represent wafer defects. In addition to analyzing defects, the laser imaging system can perform a variety of microscopic inspection functions including defect detection and metrology. The laser imaging system uses confocal laser scanning microscopy techniques, and operates under class 1 cleanroom conditions and without exposure of the wafers to operator contamination or airflow. Unlike scanning electron microscopes (SEMs) that have previously been used for defect analysis, the laser imaging system will not damage samples or slow processing, costs significantly less to implement than an SEM, can produce a three dimensional image which provides quantitative dimensional information, and allows sub-surface viewing of defects lying beneath dielectric layers. The laser imaging system is adaptable to cluster or in-situ applications, where examination of defects or structures during on-line processing can be performed.

Laser imaging system for inspection and analysis of sub-micron particles

A compression and decompression system in which a reversible wavelet filter are used to generates coefficients from input data, such as image data. The reversible wavelet filter is an efficient transform implemented with integer arithmetic that has exact reconstruction. The present invention uses the reversible wavelet filter in a lossless system (or lossy system) in which an embedded codestream is generated from the coefficients produced by the filter. An entropy coder performs entropy coding on the embedded codestream to produce the compressed data stream.

Method and apparatus for compression using reversible wavelet transforms and an embedded codestream

A compression and decompression method uses a wavelet decompositin, frequency based tree encoding, tree based motion encoding, frequency weighted quantization, Huffman encoding, and/or tree based activity estimation for bit rate control. Forward and inverse quasi-perfect reconstruction transforms are used to generate the wavelet decomposition and to reconstruct data values close to the original data values. The forward and inverse quasi-perfect reconstruction transforms utilize special filters at the boundaries of the data being transformed and/or inverse transformed. Structures and methods are disclosed for traversing wavelet decompositions. Methods are disclosed for increasing software execution speed in the decompression of video. Fixed or variable length tokens are included in a compressed data stream to indicate changes in encoding methods used to generate the compressed data stream.

Data compression and decompression

A method is described for characterizing defects on a test surface of a semiconductor wafer using a confocal-microscope-based automatic defect characterization (ADC) system. The surface to be tested and a reference surface are scanned using a confocal microscope to obtain three-dimensional images of the test and reference surfaces. The test and reference images are converted into sets of geometric constructs, or “primitives,” that are used to approximate features of the images. Next, the sets of test and reference primitives are compared to determine whether the set of test primitives is different from the set of reference primitives. If such a difference exists, then the difference data is used to generate defect parameters, which are then compared to a knowledge base of defect reference data. Based on this comparison, the ADC system characterizes the defect and estimates a degree of confidence in the characterization.

Method for characterizing defects on semiconductor wafers

The imaging system that is described below is an image streaming system which is different from traditional compression systems. It eliminates the necessity to store a compressed version of the original image, by streaming ROI data using the original stored image. The imaging system of the present invention also avoids the computationally intensive task of compression of the full image. Instead, once a user wishes to interact with a remote image, the imaging server performs a fast preprocessing step in near real time after which it can respond to any ROI requests also in near real time. When a ROI request arrives at the server, a sophisticated progressive image encoding algorithm is performed, but not for the full image. Instead, the encoding algorithm is performed only for the ROI. Since the size of the ROI is bounded by the size and resolution of the viewing device at the client and not by the size of the image, only a small portion of the full progressive coding computation is performed for a local area of the original image. This local property is also true for the client. The client computer performs decoding and rendering only for ROI and not the full image. This real time streaming or Pixels-On-Demand™ architecture requires different approaches even to old ideas. For example, similarly to some prior art, the present imaging system is based on wavelets. But while in other systems wavelet bases are selected according to their coding abilities, the choice of wavelet bases in the present imaging system depends more on their ability to perform well in the real time framework. The system of the present invention supports several modes of progressive transmission: by resolution, by accuracy and by spatial order.

System and method for transmitting a digital image over a communication network

The present invention relates to a phase corrected raster scanned light modulator in which information modulated on a carrier is used to form a grating whose spatial frequency along the scanning line varies in accordance with the signal modulation frequency. Thickness variation in the medium on which the grating is formed causes an undesired phase modulation of the light which may be corrected by altering the carrier frequency. A novel oscillator is described which may be stepped discontinuously in frequency while the waveform and its slope remain continuous, which is of sufficient accuracy and agility to provide a real time region by region phase correction of the raster in the light modulator. The variable frequency oscillator is of high stability and can step from one value to another for intervals as short as one microsecond.

Samuel E. Craig

Papers

Phase corrected raster scanned light modulator and a variable frequency oscillator for effecting phase correction