S
Satoshi Kawachi
Publications - 4
Citations - 150
Satoshi Kawachi is an academic researcher. The author has contributed to research in topics: Heat generation & Heating element. The author has an hindex of 3, co-authored 4 publications receiving 150 citations.
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Patent
Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers
TL;DR: In this article, a flat heat source with a plural number of ring-shaped heating units of different diameters arranged concentrically and so as to face a processing surface of a semiconductor wafer is presented.
Patent
Heat treatment method and apparatus thereof
TL;DR: In this article, a cylindrical process tube with an entrance/exit is provided at one end with a heat source, and thermal processing is performed on a workpiece which has been brought in from the entrance or exit of the process tube to a prescribed position therein.
Patent
Heat treatment method
TL;DR: In this article, a cylindrical process tube that has at one end an entrance/exit is provided at the other end with a heat source, and thermal processing is performed on a workpiece which has been brought in from the entrance or exit of the process tube to a prescribed position therein.
Patent
Heat-treatment device
TL;DR: In this paper, a thermal buffer member is placed between a treatment container and an auxiliary heating source to relax the heat of the auxiliary source with the help of the thermal buffer, thus enabling uniformity of a temperature within a surface of a body to be treated during traveling.