Showing papers by "Satoshi Nagai published in 2015"
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24 Jun 2015TL;DR: In this paper, a semiconductor device includes a stacked body of N (N is an integer of 2 or more) layers stacked on a substrate and openings different in depth surrounded by the stacked body and separated from each other.
Abstract: According to one embodiment, a semiconductor device includes a stacked body of N (N is an integer of 2 or more) layers stacked on a semiconductor substrate and openings different in depth surrounded by the stacked body and separated from each other
2 citations