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Showing papers by "Satoshi Nagai published in 2017"

Patent•
Mask container and mask container storing system

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Eiji Yoneda1, Masaru Suzuki, Hiroyuki Mizuno, Satoshi Nagai, Munetaka Machida •
Toshiba1
23 Feb 2017
TL;DR: In this paper, a mask container includes a case that houses a pattern transfer mask and a heater, and the case supports the mask inside the case and the heater heats the case so that the mask in the case has a predetermined temperature.
Abstract: According to one embodiment, a mask container includes a case that houses a pattern transfer mask, and a heater. The case supports the pattern transfer mask inside the case. The heater heats the case so that the pattern transfer mask in the case has a predetermined temperature.

1 citations