In accordance with the present invention, deposition of LiCoO2 layers in a pulsed-dc physical vapor deposition process is presented. Such a deposition can provide a low-temperature, high deposition rate deposition of a crystalline layer of LiCoO2 with a desired or orientation. Some embodiments of the deposition addresses the need for high rate deposition of LiCoO2 films, which can be utilized as the cathode layer in a solid state rechargeable Li battery. Embodiments of the process according to the present invention can eliminate the high temperature (>700°C) anneal step that is conventionally needed to crystallize the LiCoO2 layer. Some embodiments of the process can improve a battery utilizing the LiCoO2 layer by utilizing a rapid thermal anneal process with short ramp rates.

Deposition of licoo2

A high-index-contrast waveguide structure material used to guide light through a low-refractive-index material. In one embodiment, the waveguide structures are capable of guiding and confining light in such a way that very high optical intensity is obtained in a small cross-sectional area or gap filled with any material with sufficiently low refractive index, relative to the remainder of the structure. The structure may be used to form resonators, optical couplers, directional optical couplers and other optical devices. Structures may be formed consistent with integrated circuit forming processes.

Waveguide structure for guiding light in low-index material

An integrated optical mode transformer provides a low loss interconnection between an optical fiber and an integrated optic waveguide having a spot size different from that of the fiber. The mode transformer is comprised of two waveguide layers, an upper layer and a lower layer, with the upper layer being contiguous to the lower layer. The lower layer is the integrated optic waveguide layer forming the optical circuit. The input dimensions of the composite two-waveguide structure supports a fundamental mode that accepts all of the light present on the optical fiber. The upper waveguide layer is tapered down from an input width to an output width and then terminates in such a way that at the termination substantially all of the input optical power resides in the lower waveguide layer. The two-waveguide layer structure is fabricated by deposition and planarization techniques.

Integrated optical mode shape transformer and method of fabrication

An optical module includes an under cladding, a first core, a second core, and an over cladding. The under cladding has a flat shape as a whole. The first core has a quadrangular cross section and is placed on the under cladding. The second core is placed on a terminal end portion of the first core. The over cladding is placed in a region including the terminal end portion of the first core and the second core placed on the terminal end portion of the first core. The under cladding and the first core placed thereon constitute a first optical waveguide. The under cladding, the terminal end portion of the first core placed on the under cladding, the second core placed thereon, and the over cladding placed on and around the second core constitute a mode field size conversion portion. The under cladding, the second core placed on the under cladding, and the over cladding placed on and around the second core constitute a second optical waveguide. The first core is made of silicon. The first and second cores differ in cross-sectional shape. A manufacturing method for the optical module is also disclosed.

Optical module and manufacturing method therefor

An electronic-integration compatible photonic integrated circuit (EIC-PIC) for achieving high-performance computing and signal processing is provided. The electronic-integration compatible photonic integrated circuit comprises a plurality of electronic circuit structures and a plurality of photonic circuit structures. The electronic and photonic circuit structures are integrated by a process referred to as monolithic integration. An electronic circuit structure includes one or more electronic devices and a photonic circuit structure includes one or more photonic devices. The integration steps of electronic and photonic devices are further inserted into standard CMOS process. The photonic circuit structures and the electronic circuit structures are integrated to form the electronic-integration compatible photonic integrated circuit device.

Electronic-integration compatible photonic integrated circuit and method for fabricating electronic-integration compatible photonic integrated circuit

Composite optical waveguide structures or mode transformers and their methods of fabrication and integration are disclosed, wherein the structures or mode transformers are capable of bi-directional light beam transformation between a small mode size waveguide and a large mode size waveguide. One aspect of the present invention is directed to an optical mode transformer comprising a waveguide core having a high refractive index contrast between the waveguide core and the cladding, the optical mode transformer being configured such that the waveguide core has a taper wherein a thickness of the waveguide core tapers down to a critical thickness value, the critical thickness value being defined as a thickness value below which a significant portion of the energy of a light beam penetrates into the cladding layers surrounding the taper structure thereby enlarging the small mode size. This primary tapered core structure may be present in either a vertical or horizontal direction and may be combined with further up taper or down taper structures in the directions transverse to the primary taper direction. Another aspect of the present invention is directed to a non-cylindrical graduated refractive index (GRID) lens structure. The non-cylindrical GRIN structure has a graded refractive index having a maximum value at its core and a minimum value at its outer edges. The grading of the refractive index is provided in a either the vertical or horizontal directions and may have either a fixed refractive index or a graded refractive index in the transverse directions. Yet another aspect of the present invention is directed to composite optical mode transformers that are combinations of the taper waveguide structures and the non-cylindrical graduated refractive index structures. Yet another aspect of the present invention is the further integration of the mode transformers with V-grooves for multiple input/output fibers and alignment platform for multiple input/output photonic chips or devices.

Integrated planar composite coupling structures for bi-directional light beam transformation between a small mode size waveguide and a large mode size waveguide

Composite optical waveguide structures or mode transformers(1300) and their methods of fabrication and integration are disclosed, wherein the structures or mode transformers are capable of bi-directional light beam transformation between a small mode size waveguide and a large mode size waveguide. One aspect of the present invention is directed to an optical mode transformer (1300) comprising a waveguide core (1345) having a high refractive index contrast between the waveguide core (1345) and the cladding (1350 or 1310), the optical mode transformer (1300) being configured such that the waveguide core (1345) has a taper wherein a thickness of the waveguide core tapers down (1348) to a critical thickness value, the critical thickness value being defined as a thickness value below which a significant portion of the energy of a light beam (1341) penetrates into the cladding layers (1350 or 1310) surrounding the taper structure thereby enlar in the small mode size.

Seng-Tiong Ho

Papers

Integrated planar composite coupling structures for bi-directional light beam transformation between a small mode size waveguide and a large mode size waveguide

Integrated planar composite coupling structures transform between a small mode size and a large mode size waveguide