S
Seok-Whan Chung
Researcher at Seoul National University
Publications - 10
Citations - 164
Seok-Whan Chung is an academic researcher from Seoul National University. The author has contributed to research in topics: Surface micromachining & Ray. The author has an hindex of 6, co-authored 10 publications receiving 164 citations.
Papers
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Journal ArticleDOI
Design and fabrication of 10×10 micro-spatial light modulator array for phase and amplitude modulation
Seok-Whan Chung,Yong-Kweon Kim +1 more
TL;DR: In this paper, a 10×10 micro-spatial light modulator (micro-SLM) array for phase and amplitude modulation of incident light is designed and fabricated using surface micromachining technology.
Journal ArticleDOI
Design and fabrication of micromirror supported by electroplated nickel posts
TL;DR: In this article, a 100 μm × 100 µm aluminium micromirror has been designed and fabricated using a thick photoresist as a sacrificial layer and as a mould for nickel electroplating.
Journal ArticleDOI
Design and fabrication of micromirror array supported by vertical springs
TL;DR: In this article, a 50 μm × 50 µm aluminum micromirror array has been fabricated using surface-micromachining technology using a vertical spring structure which is placed underneath the mirror plate.
Journal ArticleDOI
Measurements of a fabricated micro mirror using a lateral-effect position-sensitive photodiode
Seok-Whan Chung,Yong-Kweon Kim +1 more
TL;DR: The characteristics of a fabricated micro mirror were determined using an optical measurement system that consisted of a helium-neon laser, a p-i-n lateral-effect photodiode, and other fundamental optical elements using nickel electroplating.
Proceedings ArticleDOI
Design And Fabrication Of Micro Mirror Supported By Electroplated Nickel Posts
TL;DR: In this paper, a 100 x 100/spl mu/m/sup 2/ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer and as a mold for nickel electroplating.