S
Seong-Hwan Myung
Researcher at SK Hynix
Publications - 1
Citations - 212
Seong-Hwan Myung is an academic researcher from SK Hynix. The author has contributed to research in topics: Amorphous carbon & Layer (electronics). The author has an hindex of 1, co-authored 1 publications receiving 212 citations.
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Patent
Method for Fabricating Semiconductor Device
TL;DR: In this article, a method for fabricating a semiconductor device, in which a lifting phenomenon can be prevented from occurring in forming an amorphous carbon film on an etched layer having tensile stress, was proposed.