The present invention is directed toward an interferometric sensor that permits the simultaneous measurement of a change in more than one environmental condition. The interferometric sensor comprises an optical fiber and a plurality of sensing regions positioned in an operable relationship to the optical fiber. Each sensing region has partially reflective boundaries and produces an interferometric signal.

Interferometric sensors utilizing bulk sensing mediums extrinsic to the input/output optical fiber

An optical sensor and a method of manufacturing such as sensor are provided. The sensor includes a lead optical fiber with a single piece optical element joined permanently joined to its forward end. The optical element defines a spacer with a cavity therein at one end, and a diaphragm at the opposite end. The diaphragm is flexible in response to a parameter and the sensor defines a sensing Fabry-Perot resonator.

Single piece fabry-perot optical sensor and method of manufacturing the same

A diaphragm optic sensor comprises a ferrule including a bore having an optical fiber disposed therein and a diaphragm attached to the ferrule, the diaphragm being spaced apart from the ferrule to form a Fabry-Perot cavity. The cavity is formed by creating a pit in the ferrule or in the diaphragm. The components of the sensor are preferably welded together, preferably by laser welding. In some embodiments, the entire ferrule is bonded to the fiber along the entire length of the fiber within the ferrule; in other embodiments, only a portion of the ferrule is welded to the fiber. A partial vacuum is preferably formed in the pit. A small piece of optical fiber with a coefficient of thermal expansion chosen to compensate for mismatches between the main fiber and ferrule may be spliced to the end of the fiber.

Optical fiber sensors for harsh environments

A Fabry-Perot optical sensor for sensing a parameter such as pressure or the like is provided. The sensor includes a lead optical fiber from the end of which projects a spacer having an end surface curving inwardly. A diaphragm extends across the forward end of the spacer. The diaphragm is flexible in response to the parameter to be measured and defines a forward reflector of the Fabry-Perot cavity within the optical sensor. A method for manufacturing such a sensor is also provided.

Fabry-perot optical sensor and method of manufacturing the same

Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.

Methods for determining wafer temperature

An optical interferometer comprises a multi-mode sapphire fiber as a high temperature sensor. One end of the sapphire fiber is coupled to a silica fiber and, in turn, to the sapphire fiber. The sapphire fiber sensor produces reference and sensor reflections that produce optical fringes at the output of a detector coupled to the silica optical fiber via an opto-coupler. The optical fringes are related to displacements of the sensor which, in turn, can provide an indirect measurement of pressure, strain or temperature of the surface.

Shari Feth

Papers

Sapphire optical fiber interferometer