S
Shiyunkou Takagi
Publications - 1
Citations - 8
Shiyunkou Takagi is an academic researcher. The author has contributed to research in topics: Phase-shift mask & Transmittance. The author has an hindex of 1, co-authored 1 publications receiving 8 citations.
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Mask for optical exposure
TL;DR: In this article, a phase shift mask is constituted of the translucent phase shift film which generates the absorption to the exposure light on a transparent quartz substrate, such as KrF excimer laser SOG(spin on glass), silicon phosphorus glass, silicon phosphorus boron glass, org high-polymer film, etc.