The present invention is to provide a beam homogenizer, a laser irradiation apparatus, and a method for manufacturing a semiconductor device, which can suppress the loss of a laser beam and form a beam spot having homogeneous energy distribution constantly on an irradiation surface without being affected by beam parameters of a laser beam. A deflector is provided at an entrance of an optical waveguide or a light pipe used for homogenizing a laser beam emitted from a laser oscillator. A pair of reflection planes of the deflector is provided so as to have a tilt angle to an optical axis of the laser beam, whereby the entrance of the optical waveguide or the light pipe is expanded. Accordingly, the loss of the laser beam can be suppressed. Moreover, by providing an angle adjusting mechanism to the deflector, a beam spot having homogeneous energy distribution can be formed at an exit of the optical waveguide.

Beam homogenizer, laser irradiation apparatus and method for manufacturing semiconductor device

PROBLEM TO BE SOLVED: To provide a laser welding method capable of highly precisely determining the presence/absence of welding abnormality when forming spot-shaped weld zones SOLUTION: The spot-shaped weld zones W1-W3 are successively formed along a planned welding region R of workpieces 10A, 10B for determination Then, the light intensity of welding points during welding is detected by a sensor 4 for detecting machining point temperature to obtain by a determination device 3 a determination output value output from this sensor 4 Successively, a transfer average value is determined for each prescribed data point of the determination output value by the abnormality discriminating part 31 of the determination device 3, with this transfer average value deducted from the determination output value Then, the frequency, in which the determination output value with the transfer value deducted becomes the pre-set prescribed output value within a prescribed time, is determined as the determination value and, by collating this value with a preliminarily set determination value comparison table, the presence/absence of welding abnormality is discriminated COPYRIGHT: (C)2009,JPO&INPIT

Laser welding method

This invention prevents the failure of detection for horizontal and oblique lift-offs in a probe for an eddy current flaw detection test. A plurality of probes are provided, and each probe includes four detection coils. Two adjacent eddy current flaw detecting probes commonly own (share) one of the four coils. The detection coils are connected to a bridge circuit for picking up a flaw signal. The detection coils are adjusted so that interlinkage magnetic fluxes generated inside the detection coils by the eddy current become equal. An excitation coil for inducing the eddy current in a test piece by AC driving can be disposed over the detection coils. The center of the excitation coil is positioned on the center axes of the detection coils. An oscillator for applying an AC current to this excitation coil is connected to the coil.

Eddy current flaw detector

In an eddy current testing probe, efficiency is improved by multiplexing, at the probe head, signals to and from a large number of coils on the probe head onto a reduced number of signal conductors, and by reusing coils in different measurement configurations in order to provide a higher density of inspection coverage.

Eddy current probe with multi-use coils and compact configuration

A radiation inspection apparatus may include a radiation source that irradiates linear radiation, which is parallel to an inspection direction set on an inspection target, to the inspection target, a line type detector that detects the radiation transmitted through the inspection target, a correction detector that is disposed in at least one of a position between the radiation source and the inspection target and a position between the inspection target and the line type detector, the correction detector moving along the inspection direction to detect the radiation, which has been irradiated from the radiation source, at each of a plurality of inspection positions along the inspection direction, and a correction device that corrects the detection result of the line type detector by using the detection result of the correction detector.

Radiation inspection apparatus

PROBLEM TO BE SOLVED: To make a mechanism for monitoring a process condition of a processing object or a condition of a machine simple by directly detecting reflected light which is reflected from the processing object, and to easily and surely monitor the process condition of the processing object or the condition of the machine. SOLUTION: In this machine, light intensity of reflected light 16 which is reflected from a processing object 8 is detected by a photodetector 15, and a detected detection signal V2 of the light intensity is given to a monitoring controller 14. In the monitoring controller 14, the detection signal V2 is compared with the preset threshold of the light intensity, and according to the results, the process condition of the processing object 8 or operation condition of the machine is monitored.

Laser beam machine

PROBLEM TO BE SOLVED: To provide a thin plate inspection device capable of feeding a thin plate without damaging the same, capable of easily correcting angular shift and capable of easily corresponding to a size change. SOLUTION: In the thin plate inspection device for feeding the thin plate 4 such as a liquid crystal substrate or the like to the inspection station 3 on a surface plate 2 to inspect the same, a thin plate transfer means 6 for grasping the front end 5 of the thin plate 4 to transfer the same on the surface plate 2, air sliders 7 provided on the surface plate 2 before and behind the inspection station 3 and floating the transferred thin plate 4 by air, and air bearings 8 provided to the inspection station 3 and performing the blowing and sucking of air with respect to the thin plate 4 at the same time to adjust the floating height of the thin plate 4, are provided.

Thin plate inspection device

PROBLEM TO BE SOLVED: To provide an apparatus and a method for detecting a mobile unit allowing to detect a mobile unit stably, even under the condition where the environment in the monitoring area fluctuates and the condition where the reference plane for detecting the mobile unit cannot be set to be a plane. SOLUTION: A background distance generation section 21, on the basis of measurement results of a laser radar 10, generates a background distance map, indicating the distance information from the laser radar 10 in a detection area to an object in the background. A mobile unit detecting section 23 detects a mobile unit in the detection area from the difference between the distance information of the background distance map stored in a background distance map memory 22, in advance, and the measurement results of the laser radar 10. COPYRIGHT: (C)2006,JPO&NCIPI

Apparatus and method for detecting mobile unit

PURPOSE: To obtain the title sensor capable of performing the detection of a bead present position not becoming necessary for the running of an ultrasonic flaw detection running device along a weld line and the detection of a cross bead useful for the correction of measured distance data without performing mechanical scanning. CONSTITUTION: A profiling bead sensor part 23 having a large number of coils densely arranged thereto zigzag or linearly on a plane in the direction crossing the running direction of a self-propelling truck 7, a cross bead sensor part 24 wherein a plurality of coils 24 are arranged to the ends of the sensor part 23 in the truck running direction, a changeover switch successively selecting three coils as a unit for exciting coils and detection coils while shifting the coils 22 of the profiling bead sensor 23 one at a time to subject them to the eddy current flaw detection of a profiling bead position and a changeover switch successively selecting three coils as a unit for exciting coils and detection coils while shifting the coils 24 of the cross bead sensor part one at a time to subject them to the eddy current flaw detection of a cross bead position 6b are provided to the self-propelling truck 7 allowed to run along a weld line. COPYRIGHT: (C)1993,JPO&Japio

Weld bead position sensor

PROBLEM TO BE SOLVED: To enable the traffic weak to walk across a crossing safely, and to prevent meaningless traffic congestion through proper signal switching by measuring the size and shape of a person, etc., to be detected in a pedestrian crossing without being affected by environmental states such as weather, and measuring the position and moving speed of the person, etc. SOLUTION: This device is equipped with a laser range finder 6 which projects scanning laser light 15 on a detection range covering the pedestrian crossing and waiting for-signal areas and measures the reflection time of reflected laser light 16 reflected from the detection range, a measuring instrument 20 which measures the shape and position of an object of detection with the detection signal 19 from the laser range finder 6 and also measures the elapsed time to measure the moving speed of the object of detection, and a signal correcting device 24 which outputs a correction signal 23 to a signal switch 21 according to the measured value 22 of the measuring instrument 20.

寿夫中村

Papers

Laser beam machine

Thin plate inspection device

Apparatus and method for detecting mobile unit

Weld bead position sensor

Method and device for signal control in pedestrian crossing

寿夫 中村

Papers

Laser beam machine

Thin plate inspection device

Apparatus and method for detecting mobile unit

Weld bead position sensor

Method and device for signal control in pedestrian crossing

寿夫中村