The present disclosure includes apparatuses and methods related to performing logical operations using sensing circuitry. An example apparatus comprises an array of memory cells and sensing circuitry coupled to the array an array of memory cells via a sense line. The sensing circuitry is configured to sense, as a voltage associated with a second operand of a logical function, a voltage on the sense line corresponding to a first logical data value resulting in part from reading a first memory cell of the array of memory cells associated with a first operand of the logical function.

Performing logical operations using sensing circuitry

Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.

Methods and systems for liquid particle prequalification

An ultrasonic generator tank includes an ultrasonic generator contains a first liquid in which ultrasonic waves propagate. A particle extraction vessel contains a high-purity second liquid, such as ultrapure water, and an object to be inspected. A power unit is turned on to oscillate the ultrasonic generator. The particle extraction vessel, which contains the second liquid and the to-be-inspected object, is inserted into the first liquid from above the surface thereof after the lapse of a first time since the start of oscillation of the ultrasonic generator. As the particle extraction vessel is inserted into the first liquid, the ultrasonic generator continues to produce ultrasonic waves. The quantity of particles contained in the second liquid is measured after the lapse of a second time.

Cleanliness inspection apparatus and cleanliness inspection method for object to be inspected

The invention relates to a measurement plate and a measurement method for measuring circuit board horizontal line ultrasonic intensity, comprising a plate body and tin foil paper; the plate body is provided with an opening which is sealed by the tin foil; and the thickness of the tin foil paper is 10-20 Mum. The measurement method for measuring circuit board horizontal line ultrasonic intensity comprises steps of transmitting the measurement plate having a first preset thickness to a ultrasound wave band, enabling the tin foil paper to vibrate in the ultrasonic wave to test that whether the tin foil paper is damaged by the measurement plate which stops for a first time frame in the ultrasonic wave band, transmitting a measurement plate having a second preset thickness to the ultrasonic wave band, enabling the tin foil paper to vibrate in the ultrasonic wave in order to test whether the tin foil is damaged by the measurement plate which stops for a second preset time frame in the ultrasonic wave band, and determining whether the ultrasonic wave band intensity is in the first intensity range according to the fact whether the tin foil paper having the first preset thickness and the second preset thickness is damaged.

Measurement plate and measurement method for measuring circuit board horizontal line ultrasonic intensity

FIELD: measurement technology.SUBSTANCE: use: to determine intensity of ultrasonic field in liquid. Summary of invention consists in the fact that into the bath with the analyzed liquid by the end face to the emitter of ultrasonic oscillations installed in the bath, partially immersed optically transparent measuring chamber, made of monodisperse porous glass with pore size, at least by an order less than wavelength of optical radiation, which is passed through measuring chamber. Under action of ultrasonic capillary effect liquid penetrates into pores of measuring chamber and changes its refraction index. Change in the refraction index over a certain period of time enables determining the rate of change thereof and calculating the intensity of the ultrasound using a calibration curve.EFFECT: high accuracy of measuring intensity of an ultrasonic field in a liquid at atmospheric pressure.1 cl, 1 dwg

Method of measuring intensity of an ultrasonic field in a liquid

A method of and an apparatus for measuring the strength of ultrasonic waves are provided. They are capable of measuring the strength of ultrasonic waves easily and at low cost without using a sound pressure meter. The ultrasonic wave strength measuring apparatus has a particle source soaked in a cleaning liquid, an oscillator to generate the ultrasonic waves whose strength is going to be measured to vibrate the particle source so that particles are eluted from the particle source into the cleaning liquid, a counter to count the number of particles in the cleaning liquid, and an operation unit to find the strength of the applied ultrasonic waves based on the counted number of particles.

Method of and apparatus for measuring strength of ultrasonic waves

PROBLEM TO BE SOLVED: To provide a cleanness inspection device for an inspection target object that has small variance in extraction of particles.SOLUTION: First liquid 30 in which an ultrasonic wave is propagated is stored in an ultrasonic wave generation tank 20 including an ultrasonic wave oscillator 25. A particle extraction container 21 contains second liquid 40 of high purity such as ultrapure water and the inspection object 50. A power supply unit 26 is turned on to make the ultrasonic oscillator 25 oscillate. The particle extraction container 21 containing the second liquid 40 and inspection object 50 is inserted into the first liquid 30 from above a liquid level 30a a first time after the ultrasonic wave oscillator 25 starts oscillating. The ultrasonic wave oscillator 25 continues to generate the ultrasonic wave. The amount of particles contained in the second liquid 40 is measured a second time later.

Shuichi Akutsu

Papers

Method of and apparatus for measuring strength of ultrasonic waves

Cleanliness inspection apparatus and cleanliness inspection method for object to be inspected

Cleanness inspection device for inspection target object, and cleanness inspection method