S
Shunpei Yamazaki
Publications - 1
Citations - 174
Shunpei Yamazaki is an academic researcher. The author has contributed to research in topics: Getter & Tantalum. The author has an hindex of 1, co-authored 1 publications receiving 174 citations.
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Semiconductor device and method of fabricating same
TL;DR: In this paper, the TFTs are fabricated using an active layer crystallized by making use of nickel, and the gate electrodes are comprising tantalum, and a heat treatment is performed to getter nickel element in the active layer and to drive it into the source/drain regions.