S
Steven J. Radigan
Researcher at SanDisk
Publications - 23
Citations - 627
Steven J. Radigan is an academic researcher from SanDisk. The author has contributed to research in topics: Layer (electronics) & Etching (microfabrication). The author has an hindex of 13, co-authored 23 publications receiving 627 citations.
Papers
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Patent
Nonvolatile memory cell comprising a reduced height vertical diode
S. Brad Herner,Steven J. Radigan +1 more
TL;DR: A nonvolatile memory cell according to the present invention comprises a bottom conductor, a semiconductor pillar, and a top conductor as mentioned in this paper, where the conductivity types of the top and bottom heavily doped regions are opposite.
Patent
Method for fabricating high density pillar structures by double patterning using positive photoresist
TL;DR: In this article, a method of making a semiconductor device includes forming a first photoresist layer over an underlying layer, patterning the first photoreceptors into a first-spaced apart pattern, and etching the underlying layer using the first-spectral pattern as a mask to form a plurality of first-scores apart features.
Patent
Conductive hard mask to protect patterned features during trench etch
TL;DR: In this article, a method for forming patterned features using a conductive hard mask is described, where the hard mask provides a margin to avoid overetch during the trench etch which may be harmful to device performance.
Patent
Three dimensional horizontal diode non-volatile memory array and method of making thereof
TL;DR: In this paper, a non-volatile memory device contains a three-dimensional stack of horizontal diodes located in a trench in an insulating material, a plurality of storage elements, and word lines extending substantially vertically.
Patent
Masking of repeated overlay and alignment marks to allow reuse of photomasks in a vertical structure
TL;DR: In this article, a blocking structure is created vertically interposed between subsequent instances of the same reference mark, preventing interference, using the methods of the present invention, which is used to prevent interference.