S
Supriya Jaiswal
Publications - 1
Citations - 81
Supriya Jaiswal is an academic researcher. The author has contributed to research in topics: Extreme ultraviolet & Extreme ultraviolet lithography. The author has an hindex of 1, co-authored 1 publications receiving 81 citations.
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Materials, components, and methods for use with extreme ultraviolet radiation in lithography and other applications
TL;DR: Nanostructured photonic materials and associated components for use in devices and systems operating at ultraviolet (UV), extreme ultraviolet (EUV), and/or soft Xray wavelengths are described in this paper.