An airway adapter (16) that comprises a housing (24) and a pressure transducer (45a). The housing comprises a flow path (26) having a first end and a second end, a first pressure port (40) that communicates with the flow path, and a second pressure port (42) that communicates with the flow path. The first pressure port is spaced apart from the second pressure port. The flow restriction is disposed in the flow path between the first and second pressure ports that creates a pressure differential therebetween. The pressure transducer generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, wherein the pressure transducer comprises an optical interferometer.

Airway adaptor with optical pressure transducer and method of manufacturing a sensor component

A physical quantity sensor includes a diaphragm which is able to be bent and deformed; and a bending amount element, provided in the diaphragm, which outputs a signal based on the amount of bending of the diaphragm. The bending amount element includes a center side element which is provided closer to the center of the diaphragm and an edge portion side element which is provided closer to an edge portion of the diaphragm than the center side element.

Physical quantity sensor, altimeter, electronic apparatus, and moving object

PURPOSE:To enable differential pressure measuring accuracy to be improved by eliminating characteristic compensation of influence of differential pressure and plant control performance to be improved by reducing processing time. CONSTITUTION:A pressure difference which is generated at both edges of an orifice 560 which is provided halfway at a pipe line 550 of a chemical plant, etc., is measured by a compound transmitter 300 and a flow within the pipe line is obtained and is transmitted to a control device 500. The control device 500 controls a pump which gives pressure to the fluid within the pipe line according to the measured flow and makes an adjustment so that a proper flow can be sent. Then, for eliminating a nonlinear influence when the pressure difference is operated, gauge resistors for detecting static pressure 5-8 are placed so that a stress which is generated by the differential pressure is equal and the static pressure is measured by forming a bridge for canceling the influence of the differential pressure which operates on each gauge resistor for detecting static pressure.

Compound sensor and compound transmitter and plant system using it

PURPOSE:To make it possible to measure a differential pressure with high precision, by providing a first bridge circuit obtaining a differential pressure output comprising a hydrostatic error using a diffused resistance layer as a pressure sensitive element and a second bridge circuit obtaining a hydrostatic pressure output using a diffused resistance layer for compensation. CONSTITUTION:It becomes possible to measure a fluid pressure with high precision without any influence of a hydrostatic pressure by providing diffused resistance layers 13a-13d sensitive to the hydrostatic pressure on the same semiconductor monocrystalline plate 1 other than diffused resistance layers 3a-3d for detecting a differential pressure and constituting a bridge circuit so as to offset a hydrostatic pressure error using these diffused resistance layers 3. A first bridge circuit outputting the differential pressure comprising the hydrostatic pressure error and a second bridge circuit outputting only the hydrostatic pressure are separately constituted and an output amplifier of the second bridge circuit is provided as a variable gain type. As a result, compensation with high precision becomes possible.

Susumu Kimijima

Papers

Semiconductor pressure measuring apparatus