A novel method for depositing ceramic thick films by aerosol deposition (AD) is presented. Submicron ceramics particles are accelerated by gas flow up to 100–500 m/s and then impacted on a substrate, to form a dense, uniform and hard ceramic layer at room temperature. However, actual deposition mechanism has not been clarified yet. To clarify densification mechanism during AD, a mixed aerosol of α-Al2O3 and Pb(Zr, Ti)O3 powder was deposited to form a composite layer in this study. The cross-section of the layer was observed by HR-TEM to investigate the densification and bonding mechanism of ceramic particles. As a result, a plastic deformation of starting ceramic particles at room temperature was observed.

Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers

Ceramic integration technology requires downsizing and/or improvement of device performance in many applications, such as in the fabrication of microelectromechanical systems, display devises, fuel cells, optical devices, and RF components. For these applications, realization of high-speed deposition rate, low process temperature, and fine patterning in ceramic coating are very important. The aerosol deposition (AD) method has many advantages for above requirements in comparison with conventional thin-film method or thermal spray coating technology. In this article, advantages of the AD method are highlighted by realizing a comparison with conventional thin-film methods and thermal spray technology. Challenges associated with AD method are also highlighted. At the end, examples of integration of AD method in the fabrication of electronic components are also given to show the easiness in usage and in integration of this method in the device process flow.

Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices

Constitutive modeling of aluminum nitride for large strain, high-strain rate, and high-pressure applications

The response of brittle materials to uniaxial compressive shock loading has been the subject of much recent discussion. The physical interpretation of the yield point of brittle materials, the Hugoniot elastic limit (HEL), the dependence of this threshold on propagation distance and the effect of polycrystalline microstructure remain to be comprehensively explained. Evidence of failure occurring in glasses behind a travelling boundary that follows a shock front has been accumulated and verified in several laboratories. Such a boundary has been called a failure wave. The variations of properties across this front include complete loss of tensile strength, partial loss of shear strength, reduction in acoustic impedance, lowered sound speed and opacity to light. Recently we have reported a similar behaviour in the polycrystalline ceramics silicon carbide and alumina. It is the object of this work to present our observations of these phenomena and their relation to failure and the HEL in brittle materials.

On the shock induced failure of brittle solids

Parametric study of laminated glass window response to blast loads

This paper presents experimental data and computational modeling for a well-defined glass material. The experimental data cover a wide range of strains, strain rates, and pressures that are obtained from quasi-static compression and tension tests, split Hopkinson pressure bar compression tests, explosively driven flyer plate impact tests, and depth of penetration ballistic tests. The test data are used to obtain constitutive model constants for the improved Johnson-Holmquist (JH-2) brittle material model. The model and constants are then used to perform computations of the various tests.

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T. J. Holmquist

Papers

High strain rate properties and constitutive modeling of glass