T
T. Takagi
Publications - 1
Citations - 34
T. Takagi is an academic researcher. The author has contributed to research in topics: Epitaxy & Ion plating. The author has an hindex of 1, co-authored 1 publications receiving 34 citations.
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Ionized cluster beam (ICB) deposition and processes
TL;DR: Ionized cluster beam (ICB) is an ion-assisted film deposition technique by which high quality films of metals, dielectric and semiconductor can be formed at a low substrate temperature.