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T

T. Takagi

Publications -  1
Citations -  34

T. Takagi is an academic researcher. The author has contributed to research in topics: Epitaxy & Ion plating. The author has an hindex of 1, co-authored 1 publications receiving 34 citations.

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Ionized cluster beam (ICB) deposition and processes

TL;DR: Ionized cluster beam (ICB) is an ion-assisted film deposition technique by which high quality films of metals, dielectric and semiconductor can be formed at a low substrate temperature.