A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.

Lithographic apparatus, and device manufacturing method

Method for specific detection of one or more analytes in a sample. The method includes specifically associating any one or more analytes in the sample with a scattered-light detectable particle, illuminating any particle associated with the analytes with light under conditions which produce scattered light from the particle and in which light scattered from one or more particles can be detected by a human eye with less than 500 times magnification and without electronic amplification. The method also includes detecting the light scattered by any such particles under those conditions as a measure of the presence of the analytes.

Analyte assay using particulate labels

A three-dimensional ultrasonic inspection apparatus includes: a sensing device for ultrasonic inspection including an ultrasonic sensor as a transducer, in which a plurality of piezoelectric vibrators are disposed in a matrix or an array; a drive element selecting unit for selecting and driving a piezoelectric vibrator for producing an ultrasonic wave among the ultrasonic transducer; a signal detecting circuit for detecting the electric signal of the reflected echo by receiving the reflected echo from the joined area; a signal processing unit for subjecting the electric signal to signal processing and generating three-dimensional imaging data by causing the electric signals to correspond to mesh elements in a three-dimensional imaging region of the object to be inspected; and a display processing device for displaying the detection results and three-dimensional image data from the signal processing unit, while detecting the size and the position of the molten-solidified portion, and the size and the position of the weld defect of the joined area, from the intensity distribution of the three-dimensional imaging data generated by the signal processing unit.

3d ultrasonographic device

An ultrasound system has a catheter including an elongate flexible catheter body having at least one lumen extending longitudinally therethrough. The catheter further includes an ultrasound transmission member extending longitudinally through the lumen of the catheter body, the ultrasound transmission member having a proximal end connectable to a separate ultrasound generating device and a distal end coupled to the distal end of the catheter body. The distal end of the catheter body is deflectable. The ultrasound system also includes a sonic connector that connects the ultrasound transmission member to an ultrasound transducer. The ultrasound system also provides a method for reverse irrigation and removal of particles.

Therapeutic ultrasound system

Ultrasound catheter devices and methods of the present invention generally provide for ablation and/or disruption of vascular occlusions. An ultrasound transmission member, such as a wire, transmits vibrational energy from an ultrasound transducer to a distal head of the catheter to disrupt vascular occlusions. At least one absorber member is disposed on or around the ultrasound transmission wire at a location adjacent the sonic connector of the catheter. The absorber member absorbs heat, vibrations, and/or the like from the ultrasound transmission wire at or near the area where the transmission wire is coupled with the sonic connector. The absorptive function typically slows the process of wear and tear on the transmission wire, thus extending the useful life of the ultrasound catheter.

Ultrasound catheter apparatus

An ultrasonograph for carrying out examination simply and quickly while achieving high resolution and high-speed processing, an ultrasonic transducer, an examining instrument, and ultrasonographing device the subject matter are disclosed Piezoelectric layers constituting an ultrasonic transducer are made of barium titanate BaTiO3 or lead titanate zirconate PZT is used and the thickness of each piezoelectric layer is 01 to 100 microm The ultrasonograph comprises a drive unit for driving one of the piezoelectric layers, a sensing unit for sensing electric signals generated by piezoelectric layers receiving echos from the object subjected to ultrasonic wave transmitted by the driven piezoelectric layer, and a processing unit for visualizing the state of the subjected object by processing the sensed electric signal

Ultrasonograph, ultrasonic transducer, examining instrument, and ultrasonographing device

There is provided an ultrasonic inspection apparatus which detects various deviations with respect to an ideal scanning position and achieves, with high accuracy, an ultrasound flaw inspection by autonomously adjusting the deviations. The ultrasonic inspection apparatus according to the present invention is provided with an integrated type ultrasound transducer including an ultrasonic transducer, an integral type ultrasound transducer control unit, an actuator for distance adjustment, an actuator for tilt control, and a distance measuring sensor. The integrated type ultrasound transducer calculates a deviation between a scanning position based on a preliminarily generated scanning path information and an ideal scanning position, and performs a deviation correction processing by autonomously controlling a distance and a tilt between an opening surface of the ultrasound transducer and an inspection region of an object to be inspected in accordance with this deviation.

Ultrasonic inspection apparatus

A pattern evaluation method includes: scanning an object to be measured on which a pattern has been formed with an energy beam and obtaining an image data of the object by detecting a scattered particle which is produced from the object; recognizing at least one edge of the pattern on the basis of the image data and calculating the coordinate positions of each edge point of a sequence of edge points constituting the shape of the edge of the pattern; deriving a straight line so that the sum of lengths of perpendiculars drawn from the edge points to the straight line is minimum; and statistically processing the lengths of perpendiculars when the straight line is derived and outputting evaluation information for quantitatively expressing roughness of the edge of the pattern.

Pattern evaluation method, pattern evaluation system and computer readable recorded medium

The object of the present invention is to provide a the three-dimensional ultrasonic imaging apparatus for improving accuracy of internal inspection of an object to be inspected and enabling an automatic determination by means of ultrasonic waves. The three-dimensional ultrasonic imaging apparatus according to the present invention includes: an ultrasonic transducer having a plurality of piezoelectric vibrators; a driving element selecting portion for selecting a piezoelectric vibrator to emit an ultrasonic wave among a plurality of the piezoelectric vibrators; a signal detecting circuit for causing ultrasonic waves emitted by the selected piezoelectric vibrator to enter the object to be inspected, receiving echo reflected from the object to be inspected, and thereby detecting an electric signal corresponding to the reflected echo; a signal processing portion for generating three-dimensional imaging data by subjecting the electric signal corresponding to the detected reflected echo to parallel arithmetic processing; and a display processing device for receiving the three-dimensional imaging data from the signal processing portion, correcting image luminance of the three-dimensional imaging data so as to flatten imaging intensity distribution in the plane direction of the surface of the object to be inspected, and then displaying a corrected result.

Takahiro Ikeda

Papers

3d ultrasonographic device

Ultrasonograph, ultrasonic transducer, examining instrument, and ultrasonographing device

Ultrasonic inspection apparatus

Pattern evaluation method, pattern evaluation system and computer readable recorded medium

Three-dimensional ultrasonic imaging device