T
Takeo Yajima
Publications - 18
Citations - 222
Takeo Yajima is an academic researcher. The author has contributed to research in topics: Bellows & Reciprocating pump. The author has an hindex of 8, co-authored 18 publications receiving 222 citations.
Papers
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Patent
Chemical liquid supply method and apparatus thereof
TL;DR: In this article, air bubbles and gelled portions in a liquid are removed so that the liquid can be discharged with improved cleanliness, and the pump chamber is expanded, thereby returning the liquid in the pump container toward the filter so that air in the filter is exhausted to the outside.
Patent
Chemical supply system with a pair of bellows connected in series for pumping a fluid
TL;DR: In this paper, a chemical supply system simplified in construction and excellent in reliability can be provided, where a flexible tube is connected to a large elastically deformable bellows in the axial direction and an incompressible medium is enclosed in a pump chamber.
Patent
Chemicals supply method and device
Takeo Yajima,丈夫 矢島 +1 more
TL;DR: In this paper, the authors proposed a method to increase the extent of cleanliness and simultaneously make a liquid dischargeable by eliminating quality defective parts such as bubbles in the liquid and some gelated sections or the like.
Patent
Flexible tank and a chemical liquid supply apparatus using the same
TL;DR: In this article, a volume-variable chamber formed by a flexible tube is used to suppress the contact between the chemical liquid and air in the volume variable chamber to a minimum level.
Patent
Filter, chemical liquid supply device and chemical liquid supply method
Takeo Yajima,丈夫 矢島 +1 more
TL;DR: In this article, a chemical liquid supply device capable of preventing chemical liquid from being discarded and applying the clean liquid is provided, which is used to apply the liquid from a nozzle to a processed object.