Tamihiro Miyoshi

TL;DR: In this article, an apparatus for correcting a scranning beam produced by a polygonal mirror tilting in small surface segments in each mirror surface segment caused by uneven mirror surfaces is presented.

TL;DR: In this article, a monitor mechanism for use with a scanning optical apparatus in which the direction of polarization is utilized to separate a source laser light beam into a pattern drawing and a monitor beamlet and synthesize them again into a single after passing through a scanning lens and beam deflector is presented.

TL;DR: In this paper, a corrected aperture plate is used to correct the locational errors of the dot images in the normal direction when the corrected aperture is used, and the image of the pattern is recorded at the position of the aperture plate and used as a guide to form corrected apertures.

TL;DR: In this article, a drawing board part in a drawing surface mechanism of a scan-type drawing device was allowed to be inclined as well as being moved vertically to enable the drawing surface to be contained within a depth of focus of a scanning lens even if undulation or the like exists on the drawing surfaces in the range of one scanning.

TL;DR: In this article, a drawing surface adjusting mechanism was proposed for large scanning pattern drawing apparatus in which a scanning optical system scans drawing rays of light along scanning lines on a workpiece on a drawing board.