An ion implantation method for forming a high concentration dopant implanted layer in a semiconductor substrate comprising irradiating an ion beam of a desired dopant in the semiconductor substrate and annealing the resultant, in which the irradiation of the ion beam is conducted with stepwise reduction of an acceleration energy for the ion beam, intercepting at least for a period during its reduction being proceeded, whereby affording the high concentration dopant implanted layer distributed as a substantially contiguous amorphous layer, and an ion implantation apparatus comprising an ion source, ion attracting means for attracting ions from the ion source, ion selecting means for selecting specified ions among the ions attracted by the ion attracting means, accelerating means for accelerating a beam of the specified ions selected by the ion selecting means with an acceleration energy stepwise reduced, beam scanning means for scanning a direction of the ion beam accelerated by the accelerating means, a sample cell having an opening through which the ion beam scanned by the beam scanning means is introduced thereto, intercepting means for intercepting the ion beam introduced to the sample cell and control means for controlling the accelerating means and the intercepting means in operation.

Ion implantation method

NEW MATERIAL:The compound of formula I [R is alkyl, haloalkyl, alkoxyalkyl, cycloalkyl, alkenyl, alkynyl, (substituted) benzyl, or 2,2-dichlorocyclopropylmethyl]. EXAMPLE: 2,4-Dichloro-5-isopropoxy trifluoromethanesulfonanilide. USE: A herbicide exhibiting excellent activity especially against the weeds in paddy field (e.g. umbrella plant, false pimpernel, bulrush, etc.) and having high safety to paddy rice plant. PREPARATION: The compound of formula I can be prepared by reacting the aniline derivative of formula II with trifluoromethanesulfonic acid halide, optionally in the presence of a base (e.g. NaOH, triethylamine, etc.) at -15W+100°C for 1W20hr. COPYRIGHT: (C)1986,JPO&Japio

Trifluoromethane sulfonanilide derivative and herbicide

PURPOSE: To sharply improve heat transfer performance and to prevent the occurrence of liguid-back, by a method wherein a flow passage member and an outer wall member are laminated together for integral formation, the volume of an outlet header, through which slits of the flow passage member are intercommunicated is set to a value large enough to allow separation of gas and liquid from each other. CONSTITUTION: A flat laminar heat transfer tube 11 is formed such that flat laminate outer wall members 16, 16, having protrusion Parts 15, intercommunicating slits 12, formed in a flow passage member 17 and serving as a refrigerant flow passage, and forming a header part 14 connected to a refrigerant outlet and inlet pipe 13, are integrally laminated. The outlet header part 14 positioned to an upper part is large enough to allow passage of a refrigerant, and has an internal volume being large enough to allow separation of gas and liquid from each other. The heat transfer pipe is used as the heat transfer pipe of a vaporizer, a 2-Phase refrigerant flowing through the lower inlet pipe 13 is separated into gas and liquid at the outlet header part 14, a liquid refrigerant is returned to a refrigerant flow passage under gravity again, and a heat transfer surface is wet, resulting in sharp improvement of heat transfer performance. COPYRIGHT: (C)1987,JPO&Japio

Heat transfer pipe

PURPOSE:To readily obtain a uniform wall material composition, by adding an aqueous solution of an alkaline material to colored clay, etc., neutralizing acidic materials contained therein, mixing short fibers therewith and mixing the resultant granulated material having improved preservation stability, solubility in kneading with water, etc., with a granulated material of a different color obtained in the similar manner. CONSTITUTION:An aqueous solution of an alkaline material, e.g. sodium hydroxide, is added to a mixture consisting essentially of a granular aggregate, e.g. sand, crushed stone, etc., and a colorant to neutralize acidic materials contained in the granular aggregate and colored clay. A wall material component consisting essentially of sodium cellulose glycolate, and short fibers, e.g. fibers for plastering or finely pulverized pulp, is mixed therewith to give a granulated material of a specific color, which is then mixed with one or more granulated materials of a different color obtained in the similar manner to afford the aimed wall material composition. The above-mentioned alkaline material is added to give 6-11pH, preferably 8-10pH when dissolving the wall material composition in water. EFFECT:A wall surface having the Japanese style feeling is obtained.

Wall material composition and production thereof

PURPOSE:To reduce the amount of generation of NOx, by producing oxygen- enriched air and nitrogen-enriched air through a film selectively permeable to oxygen, atomizing a liquid fuel by the nitrogen-enriched air, and supplying the oxygen-enriched air as secondary air. CONSTITUTION:The air that is enriched with oxygen by an oxygen-enriched air generating means 6 is supplied to a burner 2 by a first suction blower 8 attached to a first air supply pipe 7, while the air whose oxygen concentration is relatively low, that is, the nitrogen-enriched air from the oxygen-enriched air generating means 6 is supplied to the burner 2 by a second suction blower 10 attached to a second air supply pipe 9. At the burner 2, the liquid fuel is atomized by the nitrogen-enriched air, and the oxygen-enriched air is supplied as the secondary air. As a result, the generation of NOx is reduced and efficient combustion can be attained.

Method of burning liquid fuel

PURPOSE:To obtain the titled substance, useful as a viscosity increasing agent for coating materials, and capable of giving an aqueous solution of good transparency at a low cost, by dispersing an alkali cellulose in isopropyl alcohol, etc., heating the dispersion at a temperature to advance the reaction sufficiently, and reacting the dispersion with sodium beta-chloroethanesulfonate under agitation. CONSTITUTION:A dried cellulose, e.g. powdered linter pulp, is dispersed in isopropyl alcohol, etc. in a reactor, and aqueous solution of sodium hydroxide is added and agitated to give an alkali cellulose dispersion. The resultant dispersion is then heated to a temperature enough to advance the reaction, and sodium beta-chloroethanesulfonate is added to the dispersion continuously or in portions with agitation while refluxing the dispersing medium to carry out the reaction. After the completion of the reaction, excess sodium hydroxide is neutralized with acetic acid, etc., and the reaction product is filtered. The separated solid is then washed with hydrous methanol to afford the aimed substance.

Preparation of sodium salt with sulfoethyl cellulose

Gypsum casting composition

PURPOSE:A paste for fibrous walls having excellent stability against acidic substances and polyvalent metal ions and excellent adhesion to undercoats such as mortar and gypsum plaster, comprising an aggregate and sodium sulfoethyl cellulose. CONSTITUTION:A fibrous wall material is obtained by mixing with water, a paste comprising (1) an aggregate such as silica sand or Kansui sand (a kind of limestone sand) and (2) 1-30pts.wt. of sodium sulfoethyl cellulose. As the sodium sulfoethyl cellulose (2), that having a degree of etherification of 0.2-1.2 is preferred from a point of water solubility and thixotropy. EFFECT:The paste can provide wall materials having excellent wall-plastering operability and the resulting wall materials have high abrasion resistance and scratch resistance.

Paste for fibrous wall

PURPOSE:The reaction of sulfoalkylcellulose sodium salt with an ammonium salt affords the novel titled substance of a specific average substitution degree which is used as a binder for fluorescent coatings because of its good thickening and binding properties and high compatibility with surfactants. CONSTITUTION:A cellulose material such as pulp is made to react with a sulfoalkylating agent such as sodium beta-chloroethanesulfonate in an aqueous solution of sodium hydroxide, thus giving sulfoalkylcellulose sodium salt. The product is made to react with an inorganic or organic ammonium salt such as ammonium chloride to give the objective compound of 0.2 or more, preferably 0.3 or more average substitution degree of sulfoalkyl ammonium group per one anhydrous glucose unit.

Tanioka Souji

Papers

Preparation of sodium salt with sulfoethyl cellulose

Gypsum casting composition

Paste for fibrous wall

Sulfoalkylcellulose ammonium salt and its production

Composition for ceramics extrusion formation