A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.

Catadioptric Projection Objective

A projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective suitable for microlithography projection exposure machines has a plurality of optical elements transparent for radiation at an operating wavelength of the projection objective. At least one optical element is a high-index optical element made from a high-index material with a refractive index n≧1.6 at the operating wavelength.

Projection objective having a high aperture and a planar end surface

Very high aperture microlithography projection objectives operating at the wavelengths of 248 nm, 193 nm and also 157 nm, suitable for optical immersion or near-field operation with aperture values that can exceed 1.4 are made feasible with crystalline lenses and crystalline end plates P of NaCl, KCl, KI, RbI, CsI, and MgO, YAG with refractive indices up to and above 2.0. These crystalline lenses and end plates are placed between the system aperture stop AS and the wafer W, preferably as the last lenses on the image side of the objective.

Microlithography projection objective with crystal lens

A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.

Catadioptric projection objective with intermediate images

A hydraulic coupling system includes a pump, a controller, a clutch assembly, and a valve. The clutch assembly includes an actuator and a multi-disk clutch pack coupled to the actuator. Under the direction of the controller, the pump pressurizes a fluid in the actuator to engage the clutch pack and pumps the fluid through the clutch pack to cool the clutch pack. The valve maintains the fluid pumped to the actuator at a higher pressure than the pressure of the fluid pumped through the clutch pack to cool the clutch.

Hydraulic coupling system

The invention relates to a method for regulating a predetermined modifiable brake pressure in the wheel brakes of a brake system, according to which input variables that determine the brake pressure in the individual wheel brakes are evaluated and control variables of hydraulic valves are defined in a control and/or data processing system. The aim of the invention is to obviate the need for additional pressure sensors, which register the pressure of the wheel brakes. To achieve this a characteristic curve is stored in the control or data processing system, said curve correlating the valve characteristics of the hydraulic valve with a pressure differential of the hydraulic valve and the control variable of the hydraulic valve, in particular the valve flow, is defined according to said characteristic curve.

Method for regulating a predetermined modifiable brake pressure

The invention relates to a method for adjusting brake pressure in a vehicle brake system provided with an electric hydraulic pump (150, 151, 152) comprising the following steps: Detecting a prevailing brake pressure or determining a specified pressure, and gradually controlling the pump (150, 151, 152) according to the detected brake pressure or the specified pressure. In a method for opening an inlet valve (113, 123, 133, 143) of a hydraulic vehicle brake system, pressure is increased at the inlet side (113a) of the inlet valve (113, 123, 133, 143) when the difference between the pressure on the outlet side (113b) and on the inlet side (113a) of the inlet valve (113, 123, 133, 143) exceeds a positive threshold value. The invention also relates to corresponding devices.

Method and device for adjusting brake pressure and for opening an inlet valve

The invention relates to a method for determining or calibrating the brake control characteristic of a vacuum brake booster (1) of a vehicle braking system. The pressure in the working chamber (2) or the pressure difference between the working chamber (2) and the vacuum chamber (3) of the vacuum brake booster (1) is determined, and either the brake control characteristic is determined on the basis of the determined pressure or pressure difference of the vacuum brake booster (1), or the stored brake control characteristic is changed according to the determined pressure or pressure difference.

Method for determining or calibrating the brake control characteristic of a vacuum brake booster

For the analog block valve (6), a characteristic curve is entered or determined. In accordance with pressure demands, the analog block valve is supplied as a function of the curve, with further adjustment in terms of an offset value. An Independent claim is included for corresponding braking equipment.

Controlling braking system of vehicle with speed regulator unit, employs characteristic curve for block valve, adjusted by offset value

The invention relates to a method for determining a fault in or failure of a hydraulic pressure sensor or hydraulic brake circuit in a hydraulic vehicle brake system with a vacuum brake booster, with a fault in or failure of a hydraulic pressure sensor or hydraulic brake circuit being determined on the basis of a comparison between a hydraulic pressure or variables derived therefrom and the vacuum situation or point of maximum boosting of the vacuum brake booster or variables derived therefrom.

Tobias Scheller

Papers

Method for regulating a predetermined modifiable brake pressure

Method and device for adjusting brake pressure and for opening an inlet valve

Method for determining or calibrating the brake control characteristic of a vacuum brake booster

Controlling braking system of vehicle with speed regulator unit, employs characteristic curve for block valve, adjusted by offset value

Method for determining a fault in a pressure sensor or a brake circuit