A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.

Lithographic apparatus, and device manufacturing method

A system and method for combining power from DC power sources. Each power source is coupled to a converter. Each converter converts input power to output power by monitoring and maintaining the input power at a maximum power point. Substantially all input power is converted to the output power, and the controlling is performed by allowing output voltage of the converter to vary. The converters are coupled in series. An inverter is connected in parallel with the series connection of the converters and inverts a DC input to the inverter from the converters into an AC output. The inverter maintains the voltage at the inverter input at a desirable voltage by varying the amount of the series current drawn from the converters. The series current and the output power of the converters, determine the output voltage at each converter.

Distributed Power Harvesting Systems Using DC Power Sources

Switching regulators with ripple-based control (ie, ?ripple regulators?) are conceptually simple, have fast transient responses to both line and load perturbations, and some versions operate with a switching frequency that is proportional to the load current under the discontinuous conduction mode These characteristics make the ripple regulators well-suited, especially for power management applications in computers and portable electronic devices Ripple regulators also have some drawbacks, including (in some versions) a poorly defined switching frequency, noise-induced jitter, inadequate dc regulation, and a tendency for fast-scale instability This paper presents an overview of the various ripple-based control techniques, discusses their merits and limitations, and introduces techniques for reducing the noise sensitivity and the sensitivity to capacitor parameters, improving the frequency stability and the dc regulation, and avoiding fast-scale instability

Ripple-Based Control of Switching Regulators—An Overview

A monitoring system and method for monitoring performance of individual powers sources in a distributed power source system A monitoring module is coupled to each of the power sources, or to each string of serially connected power sources, to monitor and collect data regarding current, voltage, temperature and other environmental factors at the power source The collected data is transmitted over a power line to a central analysis station for analysis Data collected from each source indicates malfunction or degradation at the source Comparison of data collected from adjacent sources filters for environmental factors impacting neighboring sources such as cloudy days for a solar panel Comparison of data collected from the same source at different times indicates soiling or degradation of the source with time or periodic events such as a moving shade from an adjacent building

Monitoring of Distributed Power Harvesting Systems Using DC Power Sources

Method for distributed power harvesting using DC power sources

An N-phase switching voltage regulator includes N current sensing elements (14, 16, 23, 24) which carry respective phase currents. The voltages present at the switch node sides of the sensing elements are summed and presented to an amplifier (28) which also receives the regulator's output voltage, to produce an output which is proportional to the regulator's total output current Iout. The invention also provides a means for direct insertion of total inductor output current information into a regulator's voltage-mode control loop, to provide active voltage positioning (AVP) for the output voltage. A voltage based on total inductor output current is summed with the regulator's reference voltage; this sum and Vout are applied to the voltage control error amplifier (114), the output of which is processed to operate the regulator's switches (100, 102). This enables the regulator's ouput to have a desired droop impedance and to provide AVP of Vout as a function of total filtered inductor output current I?out(fltr)?.

Multi-phase switching regulator

A multiple-phase DC—DC converter adds at least one additional phase to an N-phase DC—DC converter to improve the converter's response to changes in load. In one embodiment, an additional phase operates at a switching frequency greater than that of the N phases, to generate a current which is added to the N phase currents to improve the converter's response to changes in load. In another embodiment, an additional phase is configured to improve the converter's response to a load release. Here, the additional phase is kept off during load increase and steady-state conditions. However, when a load release occurs, the additional phase is turned on and acts to extract current from the converter's output terminal while the N phase currents slowly fall, to reduce the magnitude of output voltage overshoot that occurs on load release.

Multiple-phase DC-DC converter topology

A switching power supply controller includes a comparator to compare a feedback signal to a first limit and a second limit, one of which includes a ramp. Limit generators may be used to generate limit signals in response to power supply signals, control signals, and/or output signals. An error amplifier may be used to generate the feedback signal in response to an output signal and an input control signal. A switching power supply may alternatively include an oscillator that shifts the switching frequency in response to the input control signal.

Switching power supply control

Voltage converter are provided for efficient generation of voltage signals in a load. The converters are formed with a group of inductors and at least two sets of buck and sync transistors that are arranged with the group so that conducted currents through each of the sets are directed through a respective one of the inductors and further directed to magnetically couple induced currents in the respective inductor of at least an associated one of the sets. Efficiency is particularly enhanced with an operational mode that is directed to light load conditions. In this mode and in at least a selected one of the sets, the buck transistor is turned off throughout the operational mode and the sync transistor is turned off for at least the time that an associated buck transistor is turned on in an associated set which couples induced currents in the respective inductor of the selected set. Preferably, the sync transistor is turned off at the end of a selected time span that begins when the associated buck transistor is turned off.

Efficient voltage converter methods and structures

A control system for a switching power supply shifts the phase of a PWM signal in response to a change in operating conditions. The phase may be shifted by resetting an oscillator that controls the PWM signal. Phase shift logic may include a sample-hold circuit that holds the value of an error signal when the PWM signal switches state. The held error signal may be compared to the real-time error signal, preferably with a user configurable offset. The output of the phase shift logic may be used to reset the oscillator.

Tod F. Schiff

Papers

Multi-phase switching regulator

Multiple-phase DC-DC converter topology

Switching power supply control

Efficient voltage converter methods and structures

Switching power supply control with phase shift