The electrostriction of elastomeric polymer dielectrics with compliant electrodes is potentially useful as a small-scale, solid-state actuator technology. Electrostrictive polymer (EP) materials are capable of efficient and fast response with high strains (> 30%), good actuation pressures (up to 1.9 MPa), and high specific energy densities (up to 0.1 J g−1). In this article, the mechanism of electrostriction is shown to be due to the electrostatic attraction of free charges on the electrodes. Although EP actuators are electrostatics based, they are shown to produce 5–20 times the effective actuation pressure of conventional air-gap electrostatics at the same electric field strength. The thin uniform dielectric films necessary for fabrication of EP actuators have been fabricated by techniques such as spin coating, casting, and dipping. A variety of materials and techniques have been used to produce the compliant electrodes, including lift-off stenciling techniques for powdered graphite, selective wetting of ionically conductive polymers, and spray coating of carbon blacks and fibrils in polymeric binders. Prototype actuators have been demonstrated in a variety of configurations such as stretched films, stacks, rolls, tubes, and unimorphs. Potential applications of the technology in areas such as microrobots, sound generators, and displays are discussed in this article.

Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation

Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

The light microscope is traditionally an instrument of substantial size and expense. Its miniaturized integration would enable many new applications based on mass-producible, tiny microscopes. Key prospective usages include brain imaging in behaving animals for relating cellular dynamics to animal behavior. Here we introduce a miniature (1.9 g) integrated fluorescence microscope made from mass-producible parts, including a semiconductor light source and sensor. This device enables high-speed cellular imaging across ∼0.5 mm2 areas in active mice. This capability allowed concurrent tracking of Ca2+ spiking in >200 Purkinje neurons across nine cerebellar microzones. During mouse locomotion, individual microzones exhibited large-scale, synchronized Ca2+ spiking. This is a mesoscopic neural dynamic missed by prior techniques for studying the brain at other length scales. Overall, the integrated microscope is a potentially transformative technology that permits distribution to many animals and enables diverse usages, such as portable diagnostics or microscope arrays for large-scale screens.

/pdf/miniaturized-integration-of-a-fluorescence-microscope-57zyni1k2h.pdf

Miniaturized integration of a fluorescence microscope

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms can be used to convert real-world signals from one form of energy to another, thereby enabling many different microsensors, microactuators and microsystems. Despite only partial standardization and a maturing MEMS CAD technology foundation, complex and sophisticated MEMS are being produced. The integration of ICs with MEMS can improve performance, but at the price of higher development costs, greater complexity and a longer development time. A growing appreciation for the potential impact of MEMS has prompted many efforts to commercialize a wide variety of novel MEMS products. In addition, MEMS are well suited for the needs of space exploration and thus will play an increasingly large role in future missions to the space station, Mars and beyond. (Some figures in this article are in colour only in the electronic version)

https://iopscience.iop.org/article/10.1088/0964-1726/10/6/301/pdf

Microelectromechanical systems (MEMS):fabrication, design and applications

Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally employed for integrated circuits, films composed of materials such as low-pressure chemical-vapor-deposition polycrystalline silicon, silicon nitride, and silicon dioxides can be sequentially deposited and selectively removed to build or "machine" three-dimensional structures whose functionality typically requires that they be freed from the planar substrate. Although the process to accomplish this fabrication dates from the 1960's, its rapid extension over the past few years and its application to batch fabrication of micromechanisms and of monolithic microelectromechanical systems (MEMS) make a thorough review of surface micromachining appropriate at this time. Four central issues of consequence to the MEMS technologist are: (i) the understanding and control of the material properties of microstructural films, such as polycrystalline silicon, (ii) the release of the microstructure, for example, by wet etching silicon dioxide sacrificial films, followed by its drying and surface passivation, (iii) the constraints defined by the combination of micromachining and integrated-circuit technologies when fabricating monolithic sensor devices, and (iv) the methods, materials, and practices used when packaging the completed device. Last, recent developments of hinged structures for postrelease assembly, high-aspect-ratio fabrication of molded parts from deposited thin films, and the advent of deep anisotropic silicon etching hold promise to extend markedly the capabilities of surface-micromachining technologies.

/pdf/surface-micromachining-for-microelectromechanical-systems-13y44jiffs.pdf

Surface micromachining for microelectromechanical systems

Deep X-ray lithography and metal plating when coupled with a sacrificial layer, SLIGA, lends itself to the fabrication of very high aspect ratio metal structures which are mechanically stiff in the substrate direction and can be very flexible in the direction parallel to the substrate. These properties can be exploited by producing a family of new flexure actuators which can produce very significant motion via thermal expansion and magnetic forces. The magnitude of thermal effects and magnetic forces are dependent on actuator geometry. An understanding of each effect allows the design of an actuator which is dominated by one or both effects. The end result is devices intended for large motion actuators in microswitch and positioning applications. They are also useful for material constant measurements of electroplated metals. >

Thermo-magnetic metal flexure actuators

Fabrication of micromechanical devices from polysilicon films with smooth surfaces

In the formation of microstructures, a preformed sheet of photoresist, such as polymethylmethacrylate (PMMA), which is strain free, may be milled down before or after adherence to a substrate to a desired thickness. The photoresist is patterned by exposure through a mask to radiation, such as X-rays, and developed using a developer to remove the photoresist material which has been rendered susceptible to the developer. Micrometal structures may be formed by electroplating metal into the areas from which the photoresist has been removed. The photoresist itself may form useful microstructures, and can be removed from the substrate by utilizing a release layer between the substrate and the preformed sheet which can be removed by a remover which does not affect the photoresist. Multiple layers of patterned photoresist can be built up to allow complex three dimensional microstructures to be formed.

Formation of microstructures using a preformed photoresist sheet

Resonant force sensors are devices which convert axially applied forces to changes in resonant frequency. These structures are fundamentally wires or beams or more complicated structures which are in a vacuum envelope. They become interesting and useful if they can be miniaturized, can be fabricated from a single material in a cost effective manner and can be excited and read via simple techniques. The devices which are reported here satisfy most of the above criteria. The construction material involves a silicon substrate, tensile strain polysilicon films and strain-compensated silicon nitride deposits. Clamped-clamped beams of polysilicon, typically 400,μm long, 40,μm wide and 2μm thick are fabricated with an isoplanar process over an oxide filled tub. Low-pressure chemical-vapor-deposited (LPCVD) nitride is used as a second sacrificial layer which also serves to support a second polysilicon layer which is part of the vacuum envelope. Internal surface adhesion problems are avoided by freeze-sublimation procedures which remove surface tension-induced beam deflections. Passivation and sealing is accomplished via LPCVD nitride and reactive sealing. Excitation and sensing is accomplished via ion implanted resistors. Experimental results always produce quality factors, Q , above 35 000. Resonant frequencies to 750 kHz have been achieved. It is estimated that these devices can measure axially applied forces below 0.1 dyne with standard electronic interfaces.

The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers

Complete integration and successful testing of a planar rotational magnetic micromotor have been demonstrated. The configuration is that of a three-phase variable reluctance stepping motor with 6 stator poles and 4 rotor poles. Stator and rotor heights of up to 300 mu m are available and rotor diameters of 285 mu m and 423 mu m were tested. Maximum rotational speeds which have been achieved with open loop excitation exceed 30000 rpm and show no change with operation in vacuum. After testing to more than 5*10/sup 7/ rotation cycles, deviations from initial operation are not observed. Vertical reluctance forces are used to levitate the rotor up to 50 mu m over the substrate. Position signals are available via integrated photodiodes which allow the rotor speed to be monitored and provide the groundwork for an active closed-loop system. >

Todd R. Christenson

Papers

Thermo-magnetic metal flexure actuators

Fabrication of micromechanical devices from polysilicon films with smooth surfaces

Formation of microstructures using a preformed photoresist sheet

The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers

A first functional current excited planar rotational magnetic micromotor