T
Tsuguhiro Tago
Publications - 1
Citations - 23
Tsuguhiro Tago is an academic researcher. The author has contributed to research in topics: Buffered oxide etch & Salt (chemistry). The author has an hindex of 1, co-authored 1 publications receiving 23 citations.
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Etchant composition and etching method
TL;DR: In this paper, an etchant composition used to etch a silicon-containing film formed on a target substrate is described, which includes at least one selected from the group consisting of an organic compound containing a hydroxyl group, a carbonyl group, an inorganic acid and inorganic salt, hydrofluoric acid, ammonium fluoride and an organic acid.