T
Tsukamoto Kazuhiro
Publications - 1
Citations - 30
Tsukamoto Kazuhiro is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Semiconductor. The author has an hindex of 1, co-authored 1 publications receiving 30 citations.
Papers
More filters
Patent
Semiconductor integrated circuit device
TL;DR: In this paper, a P-type silicon substrate is selectively oxidized to form a thick oxide film and then the oxide film is wet-etched to lower a substrate surface on an N-well.