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Tsukamoto Kazuhiro

Publications -  1
Citations -  30

Tsukamoto Kazuhiro is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Semiconductor. The author has an hindex of 1, co-authored 1 publications receiving 30 citations.

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Patent

Semiconductor integrated circuit device

TL;DR: In this paper, a P-type silicon substrate is selectively oxidized to form a thick oxide film and then the oxide film is wet-etched to lower a substrate surface on an N-well.