A variable differential phase shifter is provided. The device provides a continuous variation in phase between two outputs derived from a single input. The device is suitable for application at signal frequencies around 900 MHz, and is constructed in the form of an inner (38) and outer (37) sleeve capacitively coupled to an inner conductive rod (24) and outer conductive tube (26) respectively, wherein the inner (38), and outer (37) sleeves are connected to an input and can be moved in fixed relative relation thereby varying the phase relationship between the two outputs which are connected to the inner rod (24) and outer tube (26). A dielectric layer (25 and 27) may be provided around the inner rod (24) and outer tube (26). An unequal power division version of the device is provided for by the inclusion of a dielectric tube surrounding a portion of the inner rod.

Variable differential phase shifter providing phase variation of two output signals relative to one input signal

A lithographic projection apparatus including at least one temperature control member that at least partly surrounds at least one component selected from a group comprising mask and substrate tables, the projection system and an isolated reference frame for controlling the temperature of the surrounded components. The surface finish of the member is chosen to help keep the components which it partly surrounds isothermal during operation.

Lithographic apparatus, device manufacturing method, and device manufactured thereby

A variable differential phase shifter is provided. The device provides a continuous variation in phase between two outputs derived from a single output. The device is suitable for application at signal frequencies around 900 MHz, and is constructed in the form of an inner (38) and outer (37) sleeve capacitively coupled to an inner conductive rod (24) and outer conductive tube (26) respectively, wherein the inner (38), and outer (37) sleeves are connected to an input and can be moved in fixed relative relation thereby varying the phase relationship between the two outputs which are connected to the inner rod (24) and outer tube (26). A dielectric layer (25 and 27) may be provided around the inner rod (24) and outer tube (26). An unequal power division version of the device is provided for by the inclusion of a dielectric tube surrounding a portion of the inner rod.

A variable differential phase shifter

Provided coaxially inside a first waveguide is a second waveguide, so as to form a coaxial waveguide. The first waveguide for the passage of a low-frequency band signal (f L signal) functions as the outer conductor of the coaxial waveguide while the second waveguide for the passage of a high-frequency band signal (f H signal) serves as the center conductor of the coaxial waveguide. Feeders for f L are provided so that they penetrate through the wall of the first waveguide. Feeders for f H are provided so that they penetrate through both the first and the second waveguide walls. The distance between the first f L feeder and the first f H feeder and the distance between the second f L feeder and the second f H feeder are set at approximately one quarter of the wavelength of the f L signal. The distance between the first f H feeder and a reflector surface is also set at about one quarter of the wavelength. A reflecting bar is provided inside the second waveguide and located at a position about one quarter of the wavelength away from the second f H feeder toward the reflector surface.

Dual frequency primary radiator

PURPOSE:To prevent electro static charge, shorten radius of curvature, and improve fatigue resistance property of a belt, by forming the basic body of the belt out of textile goods used non-electrified synthetic resin yarn and non- conductive synthetic resin yarn as warp, and forming a non-conductive protecting layer on one face of the basic body. CONSTITUTION:The basic body of a belt is formed out of textile goods woven with non-electrified yarn produced from synthetic resin combined powder of non-electrified substances selected from metal powder, metallic oxide powder and carbon powder, and non-conductive yarn produced from synthetic resin, as warp. And a non-conductive protecting layer is arranged on one face of the basic body of belt. In this case, polyamide yarn or the like is used for non-conductive and non-electrified synthetic resin yarn. And synthetic rubber, plastics, and the like are used for the protecting layer. By this constitution, prevention of electro static charge, improvement of fatigue resistance property, and shortening radius of curvature can be attained.

Non-electrified belt provided with non-conductive protecting layer

PURPOSE:To optimize the opening efficiencies and side robe characteristics of two frequencies independently by taking a coaxial waveguide for a radiator dedicated to a low frequency, making its central conductor hollow, attaining a radiator dedicated to a high frequency and disposing a metallic flat plate on a surface exciting an incident mode wave to the coaxial waveguide. CONSTITUTION:The coaxial waveguide 1 is for a low frequency radio wave f1. The central conductor 1B is formed in a hollow cylinder shape to constitute a circular waveguide, and is used as a waveguide for a high frequency radio wave f2. A branching waveguide 3 for f1 and a step conversion part 4 matching the waveguide 1 and the branching waveguide 3 are provided on the incident end side of the waveguide 1. A coaxial line 5 for exciting f2 to the waveguide for f2 supports a probe 6 whose one end comes in the waveguide 1B for f2. The metallic flat plate 7 serves as an exciting mode filter for f1 in the waveguide 1 and as supporting the waveguide 2 for f2. The f1 passes through the waveguide 3 and the step conversion part 4 about lambdag/4 in length, excites the waveguide 1 in a mode TE11 with the aid of the metallic flat plate 7 as a mode filter, and is transmitted. Accordingly the waveguides for f1 and f2 can be aligned, and a high efficiency parabolic antenna covering two frequencies can be formed without beam deviation.

Primary radiator shared with two frequencies

PURPOSE:To attain phase shift without loss due to reflection and leakage in the transmission of high power microwave by providing a coaxial stub having a branch line of 1/4 wavelength and connecting freely slidably a transmission line for changing the length of line to at least one of an input and an output terminal of said stud in the transmission circuit of microwave band. CONSTITUTION:The length from a short-circuited termination of a branch line of the coaxial stub to its branching point and the length of a section 33 of a low impedance tying the input and output terminal of the coaxial stub are selected to 1/4 and 1/2 of the coaxial waveguide length. Now, the operating center frequency is demoted as F0, an operating frequency lower than the F0, as F1 and an operating frequency higher than the F0, as F2. The phase of an admittance Ys of a part of an input side of lambda0/4 at a low impedance at the frequency F1 lower than the F0 is rotated by pi.F0/F1 radians and the Ys is converted into a capacitive admittance at a branching point 37. On the contrary, the admittance y1 when viewing the branch line from the branching point is inductive. Thus, the matching is attained at the input frequency F1 or F2.

Ueda Sumio

Papers

Primary radiator shared with two frequencies

Coaxial phase shifter