U
Ulric Ljungblad
Publications - 1
Citations - 47
Ulric Ljungblad is an academic researcher. The author has contributed to research in topics: Spatial light modulator. The author has an hindex of 1, co-authored 1 publications receiving 47 citations.
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Method and apparatus for patterning a workpiece and methods of manufacturing the same
TL;DR: An apparatus for patterning a work piece including a source, and at least one reflective tilting surface adapted to induce a phase difference using a phase shifting plate and a difference in step height is described in this paper.