V
Volker Bert
Publications - 1
Citations - 16
Volker Bert is an academic researcher. The author has contributed to research in topics: Photomask & Extreme ultraviolet lithography. The author has an hindex of 1, co-authored 1 publications receiving 15 citations.
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Proceedings ArticleDOI
A novel electron-beam-based photomask repair tool
Klaus Edinger,Hans Becht,Rainer Becker,Volker Bert,Volker Boegli,Michael Budach,Susanne G÷hde,Jochen Guyot,Thorsten Hofmann,Ottmar Hoinkis,Alexander Kaya,Hans W. P. Koops,Petra Spies,Bernd Weyrauch,Johannes Bihr +14 more
TL;DR: In this article, the authors present the tool platform, its work flow oriented repair software, and associated deposition and etch processes, as well as a development roadmap towards a production tool, which will be available by the end of this year.