The invention discloses a bi-directional shearing speckle interference system based on spatial carrier and a measurement method. The system is characterized in that different-wavelength emergent light of a first light source and a second light source irradiates a measuring surface at the same time after beam expanding; diffuse reflection light of the measuring surface passes through an imaging lens, a diaphragm, a 4f system and a beam splitter prism and is divided into two beams of light; the two beams of light pass through filters and become two light beams with single wavelength, and the two light beams respectively pass through two Michelson shearing apparatuses so as to realize introduction of shearing displacement at different directions; and light with two different shearing directions passes through the beam splitter prism and irradiates on a CCD target surface. The measurement method can carry out bi-directional synchronous detection on defect of a measured object and is a nondestructive, whole-field and high-efficiency measurement method.

Bi-directional shearing speckle interference system based on spatial carrier and measurement method

The invention discloses a dynamic measurement system of digital speckle interference tiny in-plane deformation and a measurement method. The dynamic measurement system is characterized in that emergent light of a low-coherent laser device is divided into transmission light and reflection light through a light splitter; the transmission light is subjected to beam expansion and then irradiates a measured object surface; the reflection light passes through a plane mirror and a beam expanding mirror and then irradiates the measured object surface; diffuse reflection light of a measuring surface is divided into two beams of light through a light splitting prism; the two beams of light pass through the plane mirror, a diaphragm, an imaging lens and the light splitting prism respectively and then are imaged onto a CCD (Charge Coupled Device) camera. The dynamic measurement system disclosed by the invention can be used for carrying out dynamic measurement on the tiny in-plane deformation of a measured object and is a full-field, high-precision and easy-to-operate measurement system.

Dynamic measurement system of digital speckle interference tiny in-plane deformation and measurement method

The invention discloses an optical detection device for surface defects and a detection method of the optical detection device. The optical detection device comprises a laser, a polarizer, a beam expander, a first polarizing beam splitter, a shearing prism, a scanning mirror, a telecentric scanning lens, an integrating sphere collector, a first photoelectric detector, a wave plate, a second polarizing beam splitter and a second photoelectric detector, wherein the laser, the polarizer and the beam expander are arranged in sequence; the shearing prism is arranged between the first polarizing beam splitter and the scanning mirror and enables incident light to be split into two beams which have equal light intensity and are in orthogonal polarization, and a small included angle is formed between the two beams of light and on a back focal plane of the telecentric scanning lens; the wave plate is arranged between the first polarizing beam splitter and the second polarizing beam splitter, and the second polarizing beam splitter is connected with the second photoelectric detector. The optical detection device for the surface defects and the detection method of the optical detection device can improve the surface detect detecting precision and efficiency.

Optical detection device for surface defects and detection method of optical detection device

The invention discloses an adaptive optical technology-combined large-dynamic-range and high-precision phase difference method wavefront measuring instrument. The adaptive optical technology-combinedlarge-dynamic-range and high-precision phase difference method wavefront measuring instrument is formed by a light source laser, a parallel light collimation system, a beam conjugation-matching system, a wavefront corrector, a phase difference wavefront sensor and a high performance calculating and processing system, wherein the wavefront measuring instrument utilizes the wavefront corrector to introduce multiple groups of accurate known phase difference information into the phase difference wavefront sensor to form multi-channel phase difference wavefront distortion constraints, thus significantly improving the aberration detection range and sensitivity of a traditional phase difference method; and the wavefront measuring instrument utilizes the wavefront corrector, the phase difference wavefront sensor and the high performance calculating and processing system to form an adaptive optical wavefront aberration closed loop correction-measurement system so as to continuously detect the corrected residual aberrations to enable the distortion light wave after phase compensation to finally approach the ideal optical flat light wave step by step while the correcting value of the wavefront corrector is the accurate value of the wavefront aberration to be measured.

Adaptive optical technology-combined large-dynamic-range and high-precision phase difference method wavefront measuring instrument

The invention provides a three-dimensional deformation measuring method based on synthesis wavelength double-light-source shearing speckle interferometry, and belongs to the technical field of opticalimaging. The method includes: red laser and green laser respectively pass through a light beam splitter and are irradiated to a measured object through a reflecting mirror and a light beam expander,reflection occurs on the surface of the measured object, the reflected light passes through a convex lens and performs light interference through a shearing mirror, and an interference image is acquired in a CCD camera; a PZT phase shift amount is controlled through a piezoelectric ceramic controller, and the red laser and the green laser are respectively and simultaneously recorded through the CCD camera through an R channel and a G channel of a color camera; the pressure in a vacuum box is adjusted through a pressure adjusting valve, and a pressure value is displayed through a pressure meter; Fourier transform is performed on the interference image, and the relation between the synthesis wavelength phase fringe number and the single wavelength fringe number is calculated; and an in-planedisplacement derivative matrix and an out-of-plane displacement derivative matrix are calculated, and a three-dimensional deformation matrix of the object is obtained according to optical geometric characteristics of a measuring system to realize three-dimensional deformation measurement of the object.

Three-dimensional deformation measuring method based on synthesis wavelength double-light-source shearing speckle interferometry

The invention discloses a single-slit spatial carrier shearing speckle interferometry measuring system and a measuring method. The measuring system and the measuring method are characterized in that laser shot by a laser device passes through a beam expander and then irradiate a measured object in the form of diffusion light, diffuse reflection light on the surface of the measured object sequentially passes through an imaging lens, a slit diaphragm, a 4f system and a Michelson type device to be projected onto a target surface of an CCD camera. The measuring system and the measuring method can carry out nondestructive, full-field, rapid and dynamic measurement for the defects and stress deformation of the surface of the measured object and is convenient for field measurement.

Wang Xin

Papers

Single-slit spatial carrier shearing speckle interferometry measuring system and measuring method

Bi-directional shearing speckle interference system based on spatial carrier and measurement method