An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

Embodiments related to managing the process feed conditions for a semiconductor process module are provided. In one example, a gas channel plate for a semiconductor process module is provided. The example gas channel plate includes a heat exchange surface including a plurality of heat exchange structures separated from one another by intervening gaps. The example gas channel plate also includes a heat exchange fluid director plate support surface for supporting a heat exchange fluid director plate above the plurality of heat exchange structures so that at least a portion of the plurality of heat exchange structures are spaced from the heat exchange fluid director plate.

Process feed management for semiconductor substrate processing

A method of forming an insulation film by alternating multiple times, respectively, a process of adsorbing a precursor onto a substrate and a process of treating the adsorbed surface using reactant gas and a plasma, wherein a plasma is applied in the process of supplying the precursor.

Method of forming insulation film by modified PEALD

The present invention relates to a process and system for depositing a thin film onto a substrate. One aspect of the invention is depositing a thin film metal oxide layer using atomic layer deposition (ALD).

Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species

A showerhead including a body having an opening, a first plate positioned within the opening and having a plurality of slots, a second plate positioned within the opening and having a plurality of slots, and wherein each of the first plate plurality of slots are concentrically aligned with the second plate plurality of slots.

Semiconductor reaction chamber showerhead

To provide a component crimping apparatus control method which enables a measuring tool to directly measure a temperature of a part pressed by a pressing head. The component crimping apparatus control method is applied to a component crimping apparatus which crimps a component onto a plate-shaped work, and causes a measuring tool shaped identically as the work to measure a temperature or a pressure of a pressed part in a pressing process of pressing a component onto the work using a heated pressing head. The method includes acquiring information indicating whether or not the measuring tool is held in the component crimping apparatus, and, in the case where the information indicating that the measuring tool is held is acquired, positioning the measuring tool identically as the work, and executing the pressing process on the component to be attached to the measuring tool after the positioning.

Component crimping apparatus control method, component crimping apparatus, and measuring tool

PROBLEM TO BE SOLVED: To provide facility maintenance system and method for enhancing the workability and safety at the time of dealing with a trouble or performing periodic maintenance of a production facility installed in an electronic component mounting process. SOLUTION: The CPU34b at a facility mechanism section 30 detects a trouble in an electronic component mounting facility (step S11) and delivers trouble information to a display controller 22 (step S12). The display controller 22 displays a trouble message based on the trouble information (step S13). Upon recognizing the fact that power supply to the facility mechanism section 30 is turned off (step S14), the display controller 22 displays a maintenance guise corresponding to the trouble information (step S15) and an interactive maintenance guise (step S17).

Facility maintenance system and method

An ingredient delivery system and method, said system comprising at least one delivery unit group (10), each delivery unit group comprising: a first storage portion (101) for conveying and storing an ingredient to be delivered, the first storage portion being movable; a first sorting portion (102) for moving, to a second storage portion, said food material stored in the first storage portion; the second storage portion (103) for storing said ingredient provided by the first sorting portion; and a second sorting portion (104) for moving, to a target position, said ingredient stored in the second storage portion. Further disclosed is an ingredient delivery method using said system. Said system and method can realize the delivery process of raw materials from transportation to the table, improving the safety and quality of the raw materials.

Watanabe Nobuhisa

Papers

Component crimping apparatus control method, component crimping apparatus, and measuring tool

Facility maintenance system and method

Ingredient delivery system and ingredient delivery method