Piezoelectric actuators are gradually playing an important role in precision positioning applications due to their extremely fine resolution, fast responses, and large actuating forces. However, the existence of hysteresis behaviors makes a big influence on their positioning accuracies. To get high positioning accuracies, hysteresis modeling and control of piezoelectric actuators are meaningful and necessary. This paper reviews different models and control approaches of piezoelectric actuators. Novel categories of both hysteresis models and control approaches are presented. Furthermore, comparisons of different hysteresis models reveal that rate-dependent differential-based modeling is the future research focus. Comparisons of control approaches of piezoelectric actuators are presented and feedforward-feedback control and feedback control are the emphasis in the future.

A review of nonlinear hysteresis modeling and control of piezoelectric actuators

https://hal.archives-ouvertes.fr/hal-03120196/document

On hysteresis modeling of a piezoelectric precise positioning system under variable temperature

A simple magnetization model for giant magnetostrictive actuator used on an electronic controlled injector

The piezoelectric actuator (PA) is one of the most commonly used actuators in a micro-positioning stage. But its hysteresis non-linearity can cause error in the piezo-actuated stage. A modified Bouc–Wen model is presented in this paper to describe the hysteresis non-linearity of the piezo-actuated stage. This model can be divided into two categories according to the input frequency: rate-independent type and rate-dependent type. A particle swarm optimization method (PSO) is employed to identify these parameters of the Bouc–Wen hysteresis model. An inverse model feedforward compensator is established based on the modified Bouc–Wen model. The fuzzy proportional-integral-derivative (PID) controller combined with the feedforward compensator is implemented to the piezo-actuated stage. The experimental results indicate that the proposed control strategy can compensate for the hysteresis phenomenon.

A Compound Control Based on the Piezo-Actuated Stage with Bouc-Wen Model.

Rate-dependent hysteresis of the piezoelectric tube scanner (PTS) used in the atomic force microscope (AFM) deteriorates the tracking performance of the PTS and thus causes image distortion of the AFM, especially in high-speed operations. Additionally, the traditional raster pattern scanning technique also limits fast imaging of the AFM. In this work, the frequency-separation-based Gaussian Process (FSGP) is proposed to model the hysteresis of the PTS for sinusoidal scanning. In order to properly describe the rate-dependency of the hysteresis, the training dataset of the model is obtained by exciting the PTS using a sinusoidal chirp signal. So, it contains a large number of datapoints which brings a heavy computational burden. Different from the conventional Gaussian Process (GP) which utilizes the whole training dataset at test-stage, the FSGP separates the training dataset according to the target frequency of the testing reference. Only the optimal subset of the training dataset is selected for making predictions. By this way, the computational efficiency as well as the model accuracy are improved significantly. Without the inversion calculation, an inverse hysteresis compensator (IHC) is directly constructed by using the FSGP. Based on the IHC, open-loop and closed-loop controllers are designed and tested. Experiments are carried out on a commercial AFM. The tracking and imaging results demonstrate the effectiveness and superiority of the FSGP-based modeling and compensation method.

Hysteresis modeling with frequency-separation-based Gaussian process and its application to sinusoidal scanning for fast imaging of atomic force microscope

Magnetostrictive actuators invariably exhibit bias-rate-dependent hysteresis, which could cause vibration and error in the micro-positioning control. We present a methodology for linearization control for the hysteresis of a magnetostrictive actuator with a wide range of input rates and biases. The hysteresis compensation is attained through application of a dynamic Bouc-Wen model and experimental measured hysteresis properties of the magnetostrictive actuator under inputs with different frequencies and biases. The effectiveness of the compensator for hysteresis is demonstrated through experimental results of the magnetostrictive actuator under inputs at different frequencies and bias levels. Based on the proposed compensator, a displacement PID controller is applied to force the output displacement of the magnetostrictive actuator to track the desired displacement accurately thereafter. The maximum absolute tracking errors is 0.052 μm. Compared to the control results without the compensator, the compensator can reduce the control error by about 85%. The results indicate that this study provides an effective method which can compensate the hysteresis of the magnetostrictive actuator under different frequencies and biases of inputs.

Xiao Ting Rui

Papers

Non-linear compensation and displacement control of the bias-rate-dependent hysteresis of a magnetostrictive actuator