X
Xin Zhang
Researcher at Analog Devices
Publications - 3
Citations - 162
Xin Zhang is an academic researcher from Analog Devices. The author has contributed to research in topics: Silicon on insulator & Wafer. The author has an hindex of 3, co-authored 3 publications receiving 162 citations.
Papers
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Patent
Micromachined microphone and multisensor and method for producing same
John R. Martin,J Bresnahan Timothy,Core Craing,Thomas Kieran Nunan,Jason W. Weigold,Xin Zhang +5 more
TL;DR: A micromachined microphone is formed from a silicon or silicon-on-insulator (SOI) wafer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures through trenches formed through the top silicon layer.
Patent
MEMS Sensor with Cap Electrode
John R. Martin,Xin Zhang +1 more
TL;DR: A MEMS sensor includes a substrate having a MEMS structure movably attached to the substrate, a cap attached to a substrate and encapsulating the MEMS structures, and an electrode formed on the cap that senses movement of the structure.
Patent
MEMS Device with Roughened Surface and Method of Producing the Same
TL;DR: In this article, a method of producing a MEMS device having released structure is described. But this method requires the first layer to have a top surface, while the second layer has a bottom surface facing the top surface and the third layer has an insulator between the first and second layers.