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Xuan-Qi Wang
Researcher at California Institute of Technology
Publications - 1
Citations - 121
Xuan-Qi Wang is an academic researcher from California Institute of Technology. The author has contributed to research in topics: Etching (microfabrication) & Dry etching. The author has an hindex of 1, co-authored 1 publications receiving 121 citations.
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Proceedings ArticleDOI
Gas-phase Silicon Etching With Bromine Trifluoride
TL;DR: In this paper, the first study of gas phase silicon micromachining using pure bromine trifluoride (BrF/sub 3/) gas at room temperature is reported.