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Yasuhisa Otake

Publications -  1
Citations -  42

Yasuhisa Otake is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Resist. The author has an hindex of 1, co-authored 1 publications receiving 42 citations.

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Patent

Manufacture of shadow mask

TL;DR: In this article, the authors proposed a method to make an opening hole with high accuracy by a method, in which a resist film on one side of raw material for a mask is made thicker than the film on the other side, corresponding to the etching speed and quantity on the large diameter side and the small diameter side respectively, while performing etching process by making the impact force on the first half film stronger than the second half impact force.