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Yi Heng Chen

Researcher at National Chiao Tung University

Publications -  5
Citations -  79

Yi Heng Chen is an academic researcher from National Chiao Tung University. The author has contributed to research in topics: Thin-film transistor & High-κ dielectric. The author has an hindex of 5, co-authored 5 publications receiving 62 citations.

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Investigation of low operation voltage InZnSnO thin-film transistors with different high-k gate dielectric by physical vapor deposition

TL;DR: In this paper, the gate dielectric films were deposited by physical vapor deposition (PVD) process for better composition control, which can reduce the operation voltage of TFT device significantly.
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Effect of interfacial layer on device performance of metal oxide thin-film transistor with a multilayer high-k gate stack

TL;DR: In this article, the effect of interfacial layer material (SiO2 or Ga2O3) on the performance of amorphous indium gallium zinc oxide thin-film transistors with multilayer high-k gate stack is investigated.
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The influence on electrical characteristics of amorphous indium tungsten oxide thin film transistors with multi-stacked active layer structure

TL;DR: In this article, a multi-stacked active layer of thin film transistor with a novel type of channel material, amorphous indium-tungsten-oxide, is proposed to effectively enhance the carrier mobility and device stability.
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Performance improvements of tungsten and zinc doped indium oxide thin film transistor by fluorine based double plasma treatment with a high-K gate dielectric

TL;DR: In this article, a double fluorine based remote plasma treatment process is proposed for the high electronegativity of fluorine element and its similar radius as oxygen, which can be used to terminate the donor-like oxygen vacancy.