The boundary layer equations for plane, incompressible, and steady flow are 

$$\matrix{ {u{{\partial u} \over {\partial x}} + v{{\partial u} \over {\partial y}} = - {1 \over \varrho }{{\partial p} \over {\partial x}} + v{{{\partial ^2}u} \over {\partial {y^2}}},} \cr {0 = {{\partial p} \over {\partial y}},} \cr {{{\partial u} \over {\partial x}} + {{\partial v} \over {\partial y}} = 0.} \cr }$$

Boundary Layer Theory

Rarefied gas flows in channels, pipes, and ducts with smooth surfaces are studied in a wide range of Knudsen number (Kn) at low Mach number (M) with the objective of developing simple, physics-based models. Such flows are encountered in microelectromechanical systems (MEMS), in nanotechnology applications, and in low-pressure environments. A new general boundary condition that accounts for the reduced momentum and heat exchange with wall surfaces is proposed and its validity is investigated. It is shown that it is applicable in the entire Knudsen range and is second-order accurate in Kn in the slip flow regime. Based on this boundary condition, a universal scaling for the velocity profile is obtained, which is used to develop a unified model predicting mass flow rate and pressure distribution with reasonable accuracy for channel, pipe, and duct flows in the regime (0 Kn). A rarefaction coefficient is introduced into this two-parameter model to account for the increasingly reduced intermolecular collisions...

Report: a model for flows in channels, pipes, and ducts at micro and nano scales

Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

WITH the ever-widening scope of modern mathematical analysis and its many ramifications, it is quite impossible to include, in a single volume of reasonable size, an adequate and exhaustive discussion of the calculus in its more advanced stages. It therefore becomes necessary, in planning a thoroughly sound course in the subject, to consider several important aspects of the vast field confronting a modern writer. The limitation of space renders the selection of subject-matter fundamentally dependent upon the aim of the course, which may or may not be related to the content of specific examination syllabuses. Logical development, too, may lead to the inclusion of many topics which, at present, may only be of academic interest, while others, of greater practical value, may have to be omitted. The experience and training of the writer may also have, more or less, a bearing on both these considerations.Advanced CalculusBy Dr. C. A. Stewart. Pp. xviii + 523. (London: Methuen and Co., Ltd., 1940.) 25s.

Advanced Calculus I

Advanced models of fuel droplet heating and evaporation

In this series of talks, I will discuss the fluid-dynamic-type equations that is derived from the Boltzmann equation as its the asymptotic behavior for small mean free path. The study of the relation of the two systems describing the behavior of a gas, the fluid-dynamic system and the Boltzmann system, has a long history and many works have been done. The Hilbert expansion and the Chapman–Enskog expansion are well-known among them. The behavior of a gas in the continuum limit, however, is not so simple as is widely discussed by superficial understanding of these solutions. The correct behavior has to be investigated by classifying the physical situations. The results are largely different depending on the situations. There is an important class of problems for which neither the Euler equations nor the Navier–Stokes give the correct answer. In these two expansions themselves, an initialor boundaryvalue problem is not taken into account. We will discuss the fluid-dynamic-type equations together with the boundary conditions that describe the behavior of the gas in the continuum limit by appropriately classifying the physical situations and taking the boundary condition into account. Here the result for the time-independent case is summarized. The time-dependent case will also be mentioned in the talk. The velocity distribution function approaches a Maxwellian fe, whose parameters depend on the position in the gas, in the continuum limit. The fluid-dynamictype equations that determine the macroscopic variables in the limit differ considerably depending on the character of the Maxwellian. The systems are classified by the size of |fe− fe0|/fe0, where fe0 is the stationary Maxwellian with the representative density and temperature in the gas. (1) |fe − fe0|/fe0 = O(Kn) (Kn : Knudsen number, i.e., Kn = `/L; ` : the reference mean free path. L : the reference length of the system) : S system (the incompressible Navier–Stokes set with the energy equation modified). (1a) |fe − fe0|/fe0 = o(Kn) : Linear system (the Stokes set). (2) |fe − fe0|/fe0 = O(1) with | ∫ ξifedξ|/ ∫ |ξi|fedξ = O(Kn) (ξi : the molecular velocity) : SB system [the temperature T and density ρ in the continuum limit are determined together with the flow velocity vi of the first order of Kn amplified by 1/Kn (the ghost effect), and the thermal stress of the order of (Kn) must be retained in the equations (non-Navier–Stokes effect). The thermal creep[1] in the boundary condition must be taken into account. (3) |fe − fe0|/fe0 = O(1) with | ∫ ξifedξ|/ ∫ |ξi|fedξ = O(1) : E+VB system (the Euler and viscous boundary-layer sets). E system (Euler set) in the case where the boundary is an interface of the gas and its condensed phase. The fluid-dynamic systems are classified in terms of the macroscopic parameters that appear in the boundary condition. Let Tw and δTw be, respectively, the characteristic values of the temperature and its variation of the boundary. Then, the fluid-dynamic systems mentioned above are classified with the nondimensional temperature variation δTw/Tw and Reynolds number Re as shown in Fig. 1. In the region SB, the classical gas dynamics is inapplicable, that is, neither the Euler

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Kinetic Theory and Fluid Dynamics

The Poiseuille and thermal transpiration flows of a rarefied gas between two parallel plates are investigated on the basis of the linearized Boltzmann equation for hard‐sphere molecules and diffuse reflection boundary condition. The velocity distribution functions of the gas molecules as well as the gas velocity and heat flow profiles and mass fluxes are obtained for the whole range of the Knudsen number with good accuracy by the numerical method recently developed by the authors.

Numerical analysis of the Poiseuille and thermal transpiration flows between two parallel plates on the basis of the Boltzmann equation for hard‐sphere molecules

Yoshio Sone

Papers

Kinetic Theory and Fluid Dynamics

Kinetic Theory and Fluid Dynamics

Numerical analysis of the Poiseuille and thermal transpiration flows between two parallel plates on the basis of the Boltzmann equation for hard‐sphere molecules

Molecular Gas Dynamics: Theory, Techniques, and Applications

Molecular gas dynamics