A superconducting field effect device includes a substrate with an epitaxial superconducting film upon it and an insulating layer above a thinner region of the film which protects the film from the atmosphere and isolates it from a gate electrode which is on the insulating layer above a channel region of the thin film, and the epitaxial film has thicker regions suitable for contact to source and drain electrodes. Gate electrodes may be isolated from and oppose both sides of the superconducting thin regions so that enhanced modulation of a current in the thin region is provided. The invention provides high speed and high efficiency switches and modulators.

Superconducting field effect devices with thin channel layer

A cryogenic apparatus for microscopy of physical properties of an object including a thin, stiff, transparent substrate or window within the outer wall of the vacuum space of a dewar and a cryogenic sensor within the vacuum space and spaced very close distances to the window. This construction allows for positioning a sample for measurement outside of the vacuum space, at room temperature or higher and for microscopy of physical properties of the sample by monitoring the output from the cryogenic sensor as it is scanned along the surface of the sample.

Apparatus for microscopic imaging of electrical and magnetic properties of room-temperature objects

The present invention provides a method for forming a wiring having a minute shape on a large substrate with a small number of steps, and further a wiring substrate formed by the method. Moreover, the present invention provides a semiconductor device in which cost reduction and throughput improvement are possible due to the small number of steps and reduction of materials and which has a semiconductor element with a minute structure, and further a manufacturing method thereof. According to the present invention, a composition including metal particles and organic resin is irradiated with laser light and a part of the metal particles is baked to form a conductive layer typified by a wiring, an electrode or the like over a substrate. Further, a semiconductor device having the baked conductive layer as a wiring or an electrode is formed.

Wiring substrate, semiconductor device and manufacturing method thereof

An electromagnetic wave detector that detects incident light by converting the incident light into an electric signal includes a flat metal layer formed on a supporting substrate, an intermediate layer formed on the metal layer, a graphene layer formed on the intermediate layer, isolated metals periodically formed on the graphene layer, and electrodes arranged oppositely on both sides of the isolated metals. Depending on a size of a planar shape of each of the isolated metals, light having a predetermined wavelength at which surface plasmon occurs is determined out of the incident light, and the light having the predetermined wavelength is absorbed to detect a change in the electric signal generated in the graphene layer.

Electromagnetic wave detector and electromagnetic wave detector array

A drive mechanism provides a friction free movement of a movable member operated under a negative pressure environment A gas bearing arrangement movably supports the movable element relative to a stationary element The gas bearing arrangement is configured to be operated under the negative pressure environment inside the chamber A drive arrangement drives the movable element from outside the chamber

Drive mechanism having a gas bearing operable under a negative pressure environment

PURPOSE:To efficiently produce an intermediate frequency output by providing a tunable impedance matching circuit in an intermediate frequency output fetch unit in a superconducting mixer element having a Josephson junction CONSTITUTION:A tunable impedance matching circuit 3 formed on a board 1 for impedance-matching a detector 2 with an intermediate frequency amplifier to be connected to a superconducting mixer element, is provided The circuit 3 has a pair of meander type superconducting thin film inductors 4, 5 The inductor 5 of an output side is formed on a thin film heater 6 formed on the board 1 through an insulating layer The impedance matching of the detector 2 to an intermediate frequency amplifier is conducted by the L-coupling of the inductors 4, 5 In this case, the temperature of the heater 6 is controlled to effectively fetch an intermediate frequency output

Superconducting mixer element

PURPOSE:To obtain the superconductor in which the crystal density is increased and the crystal is oriented in a specified direction by superheating the compact of a powdery oxide superconducting material to melt the material, quenching the melt, successively applying concentrated heat to a part of the surface of the obtained substrate having the superconducting composition while impressing a magnetic field, and annealing the substrate CONSTITUTION:The compact 5 of a powdery oxide superconducting material is arranged in a recess 4 of a metallic cooling plate 3, and an arc discharge is generated between a carbon arc rod 2 and the cooling plate 3 to superheat and melt the compact 5 A foot switch 9 is then pressed to operate a hammer 8, hence the upper surface of the melt is pressed by the hammer and the melt is quenched, and an insulator substrate having the superconducting composition is obtained Concentrated heat is applied to a part of the surface of the substrate 13 from a heat source 14 (eg laser beam source) in an oxygen atmosphere while impressing a magnetic field on the substrate 13 from a magnetic field impressing means 15, and the substrate is annealed By this method, since the direction of the magnetic field impressed on the substrate is changed especially at a position when the concentrated heat is applied on the substrate surface, the crystal density of the superconductor is increased, the crystal is oriented in the desired direction, and the superconductivity, especially the critical current density, is improved

Production of superconductor

PURPOSE:To improve the critical current density without a heating process of high temperature and long time, by a support substrate is evenly coated with a mixed paste of oxide superconductive material, making it amorphous by scanning with laser light into a desired pattern, and by annealing the amor phous superconductive material film CONSTITUTION:An insulating support substrate 1 of high heat conductivity is evenly coated with a mixed paste of oxide superconductive material prepared by mixture of Y2O3, BaCO3, and CuO powders, and by agitation with an in organic solvent, thereby forming an oxide superconductive material film 2 Next, this film 2 is irradiated with laser light 3 from front along a specified pattern, resulting in local heat fusion At the same time, the film 2 is turned into an amorphous oxide superconductive material film 4 by scanning along the pattern Then, the film 2 of a part not made amorphous by irradiation with laser light 3 is removed with solvent Finally, the amorphous film 4 remaining on the insulating support substrate 1 is annealed in an oxidizing atmosphere into a high-density polycrystalline superconductive film 5

Manufacture of superconductive film

PURPOSE:To realize an electromagnetic wave sensor which is very susceptible to the influence of electromagnetic waves and never exists by a method wherein its main component is a superconductive thin film which is in such a structure that normal conductor is interposed between superconductive particles. CONSTITUTION:A superconductive electromagnetic wave sensor is constituted in such a manner that its main component is a superconductive thin film 11 composed of superconductive particles between which normal conductor is interposed. And, superconductive material is thermally treated for 10-20 hours for the formation of superconductor, and the superconductor is molded into a thin film to manufacture a superconductive electromagnetic wave sensor. For instance, a Y-Ba-Cu-O superconductive thin film 11 composed of electrode 12s built on its both ends and a thin wire sensing section 13 bridging the electrodes 12s is formed on an insulating substrate 10 of MgO or the like in such a manner that the superconductor thermally treated for 12 hours or so is sliced into a thin film 10mum or so in thickness and the sliced film is bonded to the insulating substrate 10 with low melting point crystalized glass, and the surface of the sliced film is polished until the film becomes about 30-40mum in thickness, the polished film is formed into the superconductive thin film 11 through laser machining.

Superconductive electromagnetic wave sensor and manufacture thereof

PURPOSE:To obtain a multi-function type superconductor element capable of selectively utilizing high temperature phase or low temperature phase according to the purpose, by using bismuth material, and positively forming three parts, e.g., a high temperature superconducting part, a low temperature superconducting part and an insulating part. CONSTITUTION:After respective powder of Bi2O3, SrCO3, CaCO3 and CuO are mixed and molded by pressure, a solid solution 1 is formed by heat treatment at a temperature higher than or equal to the melting point. The solid solution 1 is cut into a plate type member 2, and its one side surface is fixed on a base stand 3 of, e.g., crystallized glass plate by using adhesive agent. Then by laser processing or ultrasonic processing, the solid solution is worked in the form of a microbridge 4. Since a microbridge mold 5 obtained by eliminating the adhesive agent is not yet in a superconducting state, a part of the microbridge mold 5 is scanned by a beam system of laser 6 in an oxidizing atmosphere. At the time of the scanning, the output of the beam and the scanning speed are adjusted in the manner in which a laser irradiation part (a) only is kept at 870-880 deg.C. By this process, high temperature superconducting state is obtained in the laser irradiation part (a). Its vicinity (b) is given a temperature of 840-870 deg.C, and low temperature superconducting state is obtained. After that, the microbridge mold 5 is fixed on a crystallized glass substrate 7 by using epoxy system adhesive agent, and a superconductor element is obtained.

Yoshisato Masanobu

Papers

Superconducting mixer element

Production of superconductor

Manufacture of superconductive film

Superconductive electromagnetic wave sensor and manufacture thereof

Manufacture of superconductive element