An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

A process for producing a semiconductor article is provided which comprises the steps of bonding a film onto a substrate having a porous semiconductor layer, and separating the film from the substrate at the porous semiconductor layer by applying a force to the film in a peeling direction.

Process for producing semiconductor article

Ever since the first publications by R.J. Schwartz in 1975, research into back-contact cells as an alternative to cells with a front and rear contact has remained a research topic. In the last decade, interest in back-contact cells has been growing and a gradual introduction to industrial applications is emerging. The goal of this review is to present a comprehensive summary of results obtained throughout the years. Back-contact cells are divided into three main classes: back-junction (BJ), emitter wrap-through (EWT) and metallisation wrap-through (MWT), each introduced as logical descendents from conventional solar cells. This deviation from the chronology of the developments is maintained during the discussion of technological results. In addition to progress on manufacturing these cells, aspects of cell modelling and module manufacturing are discussed and an outlook towards industrial implementation is presented. Copyright © 2005 John Wiley & Sons, Ltd.

Back-contact solar cells : A review

A system and method for combining power from DC power sources. Each power source is coupled to a converter. Each converter converts input power to output power by monitoring and maintaining the input power at a maximum power point. Substantially all input power is converted to the output power, and the controlling is performed by allowing output voltage of the converter to vary. The converters are coupled in series. An inverter is connected in parallel with the series connection of the converters and inverts a DC input to the inverter from the converters into an AC output. The inverter maintains the voltage at the inverter input at a desirable voltage by varying the amount of the series current drawn from the converters. The series current and the output power of the converters, determine the output voltage at each converter.

Distributed Power Harvesting Systems Using DC Power Sources

An object is to provide a method for manufacturing a semiconductor device, in which the number of photolithography steps can be reduced, the manufacturing process can be simplified, and manufacturing can be performed with high yield at low cost A method for manufacturing a semiconductor device includes the following steps: forming a semiconductor film; irradiating a laser beam by passing the laser beam through a photomask including a shield for shielding the laser beam; subliming a region which has been irradiated with the laser beam through a region in which the shield is not formed in the photomask in the semiconductor film; forming an island-shaped semiconductor film in such a way that a region which is not irradiated with the laser beam is not sublimed because it is a region in which the shield is formed in the photomask; forming a first electrode which is one of a source electrode and a drain electrode and a second electrode which is the other one of the source electrode and the drain electrode; forming a gate insulating film; and forming a gate electrode over the gate insulating film

Method for Manufacturing Semiconductor Device

In a method for fabricating a thin film solar cell, a thin semiconductor film serving as a power generating layer is formed on a substrate via an intermediate layer, a plurality of holes are formed penetrating through the thin semiconductor film and reaching the intermediate layer, and the intermediate layer is etched away through the through-holes, separating the thin semiconductor film from the substrate with high-efficiency. Since stress is hardly applied to the thin semiconductor film during the separation process, cracking and breaking of the semiconductor film is avoided. Further, since the surface of the substrate is maintained in good condition, the substrate can be reused, resulting in a reduction in the production cost.

Method of producing thin-film solar cell

PURPOSE:To obtain a method of manufacturing a thin film solar cell, which separates efficiently a semiconductor thin film from a heat-resistant substrate and can use repeatedly the substrate. CONSTITUTION:A peel layer 2 consisting of a silicon oxide film, a semiconductor thin film 3 consisting of a P-type polycrystalline silicon thin film and a cap layer 4 consisting of a silicon oxide film are formed in order on a heat-resistant substrate 1 consisting of a single crystal silicon wafer. Then, a zone melting recrystallization of the thin film 3 is performed. Then, the layer 4 is removed and thereafter, a bonding layer 5 is formed on the upper surface of the thin film 3. Then, through holes 8 to reach the layer 2 are formed in the thin film 3. Then, the layer 2 is etched away through the holes 8 and the thin film 3 is separated from the substrate 1. Then, electrodes are respectively formed on the upper and lower surfaces of the thin film 3.

Manufacture of thin film solar cell and thin film solar cell

PROBLEM TO BE SOLVED: To provide a roughening method of a silicon substrate surface for a solar battery, which improves the photoelectric conversion characteristic of the solar battery and can easily manufacture the battery at a low cost, and a polycrystalline silicon substrate manufactured by the method. SOLUTION: The surface of a silicon substrate for a solar battery is roughened by a process which disperses and attaches fine particles 2 for a mask on the whole surface of a polycrystalline silicon substrate 1, a process etching a region of the substrate 1 surface on which region the fine particles 2 do not attach, and a process which eliminates the fine particles 2 left on the substrate 1 surface. The fine particles 2 for a mask are dispersed and attached on the whole surface of the polycrystalline silicon substrate 1, and the surface is etched. Thereby the region of the substrate surface, on which region the fine particles 2 do not attach, is preferentially etched. When the fine particles left on the mask are eliminated, the parts on which the fine particles 2 have attached become protrusions, and the parts on which the particles have not attacked become recesses. Uniform unevenness is formed on the surface, so that a polycrystalline silicon substrate having low reflection factor can be produced.

Roughening method of silicon substrate surface for solar battery

A solar battery cell, solar battery module, and solar battery module group achieving high product value by enabling the display of surface patterns without reducing the power generating efficiency of the solar battery cells are provided. The direction and/or reflectance of reflected light incident to the surface of the solar battery cell are varied by controlling the distribution of the rough surface structure imparted to the solar battery cell surface. The direction or reflectance of reflected light incident to the surface of the solar battery cell is changed in part depending upon the part of the semiconductor solar battery cell surface to which the light is incident. Semiconductor solar battery cells with high product value can therefore be achieved because patterns with strong visual impact can be displayed and easily recognized without reducing the power generation efficiency of the solar battery cell.

Solar battery cell, a solar battery module, and a solar battery module group

A process of forming electrodes is simplified during modularizing of a solar battery. According to the manufacturing method and the manufacturing apparatus, a thin solar battery is manufactured at a reduced cost and with a better yield. Using a robot which includes a suction chip which can handle a semiconductor film 2 without any damage which is separated from a particular substrate 1, the semiconductor films 2 are each accurately placed through a transparent resin 3 onto a glass substrate 7 which serves as a window of a solar battery, and p-type and n-type electrodes are printed at a time on the semiconductor films 2 which are arranged. Further, since a monolithic tab electrode is soldered to connect the electrodes, the manufacturing processes of the solar battery are simplified.

Yoshitatsu Kawama

Papers

Method of producing thin-film solar cell

Manufacture of thin film solar cell and thin film solar cell

Roughening method of silicon substrate surface for solar battery

Solar battery cell, a solar battery module, and a solar battery module group

Method of and apparatus for manufacturing thin solar battery