A digital phase shift lateral shearing interferometer and an optical system wave aberration measurement method The interferometer comprises a light source (1), a small-hole mask (2), a first spatial light modulator (4), a second spatial light modulator (6), a two-dimensional photoelectric detector (8) and a computer (9), the first spatial light modulator (4) being set as an optical grating by means of computer programming and taken as a shearing light splitter, and the second spatial light modulator (6) being set as a double-window mask and taken as a filter device configured to filter out high order diffractive light of grade 0 and grade 2 or above, thereby enabling only diffractive light of grade +1 and grade -1 to take part in interference The digital phase shift lateral shearing interferometer and the optical system wave aberration measurement method solve the problem of participation in interference of high order diffractive light, and have the advantages of realizing a changeable shearing direction and an adjustable shearing rate without replacing or rotating any device; and a system is more flexible

Digital phase-shifting lateral shearing interferometer and optical system wave aberration measurement method

The invention discloses a sensitivity enhancing device and method for four-wavefront lateral shear interference wavefront sensors. On the basis of a single four-wavefront lateral shear interference wavefront sensor, after a to-be-detected light beam is divided into two beams, a four-wavefront lateral shear interference wavefront sensor is added, the distances from gratings to detectors in the two wavefront sensors are respectively adjusted to enable corresponding shear rate combinations to meet a sensitivity enhancing condition, and high-resolution-ratio and high-sensitivity detection by using a Fourier transform phase reconstruction technology under the condition of large shear rate is realized. The sensitivity enhancing device and method for four-wavefront lateral shear interference wavefront sensors have the advantages that the problem of periodic oscillation existing in a demodulated wavefront phase due to a spectrum leakage when the Fourier transform phase reconstruction technology under the condition of large shear rate is used by the traditional four-wavefront lateral shear interference system is solved, the regions where the relative sensitivity is zero are eliminated by the combined shear rate, periodic missing information in a frequency spectrum is supplemented, and compared with the traditional interferometer, the device has the characteristic that the measurement sensitivity is improved.

Sensitivity enhancing device and method for four-wavefront lateral shear interference wavefront sensors

The invention discloses a transient phase shifting lateral shearing interferometer which comprises a linear polarizer, a polarization light splitting plate, a plane mirror, a quarter-wave plate, an imaging lens and a polarization camera, wherein the linear polarizer is arranged above the polarization light splitting plate, the quarter-wave plate, the imaging lens and the polarization camera are sequentially arranged on one side of the polarization light splitting plate, an included angle of 45 degrees is formed between the polarization light splitting plate and the X-axis direction, and the plane mirror is arranged below the polarization light splitting plate and is parallel to the polarization light splitting plate. Correspondingly, the invention further discloses a measuring method of the transient phase shifting lateral shearing interferometer. The transient phase shifting lateral shearing interferometer is high in measuring speed and adjustable in shearing quantity.

Transient phase shifting lateral shearing interferometer and measuring method

The invention discloses an adjustable transverse dislocation laser beam splitter/combiner, and belongs to the field of optical components and optical instruments. The beam splitter/combiner can realize parallel outgoing beam splitting of two paths of linearly polarized light with the same or vertical polarization orientation of single-color or broadband light which is transversely dislocated, or realize coherent beam combination of two paths of linearly polarized parallel light beams with the same or vertical polarization orientation and transverse dislocation. The energy ratio of the two optical paths of the beam splitter/combiner can be adjusted at will, and the phase delay between the two optical paths can be adjusted at will. In addition, the transverse dislocation distance between thetwo light paths can be adjusted at will within a certain range. The flexible and adjustable optical beam splitter/combiner has important practical value in the aspects of optical coherent detection,optical holography, complex polarized light field control and the like.

Adjustable transverse dislocation laser beam splitter/combiner

An interferometer system may include a stage assembly configured to receive and secure a sample, an illumination source configured to generate an illumination beam, a half-wave plate, one or more shearing prisms to shear the illumination beam into two beamlets along a shearing direction, a reference flat disposed proximate to the sample, a detector assembly, and a controller. The controller may cause the illumination source to generate an illumination beam and sweep the illumination beam across a plurality of wavelengths, and determine both a surface height measurement and a surface slope measurement of the sample based on the illumination received by the detector assembly.

Zeng Aijun

Papers

Spatial phase shift lateral shearing interferometer