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Showing papers by "Freescale Semiconductor published in 1982"


Patent
21 Jun 1982
TL;DR: In this article, a double dielectric layer is used as the interlayer interlayer dielectrics to avoid void formation in multilayer-metal electronic devices, where the double layer has a first oxide layer in contact with the first metal which is formed by plasma assisted chemical vapor deposition and a second oxide layer portion formed by other means.
Abstract: When multilayer-metal electronic devices are heated, voids can form in the metal layers Void formation is avoided by using a double dielectric layer as the interlayer dielectric The double layer has a first oxide layer portion in contact with the first metal which is formed by plasma assisted chemical vapor deposition, and a second oxide layer portion formed by other means The plasma formed oxide layer portion is believed to be in compressive stress relative to the substrate

32 citations


Patent
05 Aug 1982
TL;DR: In this paper, a MOS capacitive structure comprising a substrate of a first conductivity type, a substrate opposite the conductive layer, and a dielectric over a region of the substrate adjacent the first and second regions and forming one plate of the capacitor, is described.
Abstract: An MOS capacitive structure comprising a substrate of a first conductivity type, a first region of the first conductivity type but having a different impurity concentration for contacting the substrate, a second region of opposite conductivity type for contacting the substrate, and a dielectric over a region of the substrate adjacent the first and second regions and having a conductive layer thereon forming one plate of the capacitor while the substrate opposite the conductive layer forms the other plate. The first and second regions are contacted and coupled together in order to provide good electrical contact to the substrate region opposite the conductive layer regardless of whether the substrate under the conductive layer is depleted or inverted.

9 citations


Patent
23 Apr 1982
TL;DR: In this article, a half-duplex transceiver circuit is described in which a single diode acts as both the light emitter and the light detector, and the diode is connected in parallel with a junction in an associated device.
Abstract: A half-duplex transceiver circuit is disclosed in which a single diode acts as both the light emitter and the light detector. The diode is connected in parallel with a junction in an associated device. The forward voltage drop across the diode exceeds the forward voltage drop across the junction.

4 citations