scispace - formally typeset
Search or ask a question

Showing papers in "Materials Letters in 1981"


PatentDOI
TL;DR: In this paper, a hard mask layer stuck on an underlying substrate is removed from the substrate using a solvent which comprises hydrazine and dimethyl sulfoxide anhydrous, which rapidly penetrates into the interface between the configuration and the underlying substrate and quickly breaks the adhesive bond between the two.

1 citations