Patent
Arrangement for interferometric measurement of two lengths
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TLDR
In this paper, a monochromatic circularly polarized light beam is divided up by intensity in a first optical divider into an outgoing reference beam and an outgoing primary measuring beam.Abstract:
An arrangement for simultaneous interferometric measurement of a plurality of lengths utilizes a single monochromatic circularly polarized light beam which is divided up by intensity in a first optical divider into an outgoing reference beam and an outgoing primary measuring beam. This measurement beam is then divided up by intensity in a second optical divider after traversing one of the lengths to be measured into a pair of outgoing secondary measurement beams which are then polarized in mutually perpendicular planes of polarization. One of these outgoing secondary measurement beams is reversed and returned to the second optical divider and the other outgoing secondary measurement beam is also similarly reversed and returned but after it has traversed the second length to be measured. The two returning secondary measurement beams are then recombined in the second optical divider and returned to the first optical divider where they are combined with the reference beam which has been reversed and returned thus to form an outgoing light beam which is differently intensity-modulated in two mutually perpendicular planes of polarization. This outgoing light beam is then divided up in a third optical divider into a pair of modulated light beams which are then delivered respectively to photodetectors. One photodetector receives only the component of the modulated light beam which is polarized in one plane and the other photodetector receives only the component which is polarized in the other plane.read more
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