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Chemical deposition methods using supercritical fluid solutions

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TLDR
In this paper, a method for depositing a film of a desired material on a substrate comprises dissolving at least one reagent in a supercritical fluid comprising at least 1 solvent, and a chemical reaction is induced in the resulting reaction is deposited on the substrate surface.
Abstract
A method for depositing a film of a desired material on a substrate comprises dissolving at least one reagent in a supercritical fluid comprising at least one solvent. Either the reagent is capable of reacting with or is a precursor of a compound capable of reacting with the solvent to form the desired product, or at least one additional reagent is included in the supercritical solution and is capable of reacting with or is a precursor of a compound capable of reacting with the first reagent or with a compound derived from the first reagent to form the desired material. The supercritical solution is expanded to produce a vapor or aerosol and a chemical reaction is induced in the vapor or aerosol so that a film of the desired material resulting from the chemical reaction is deposited on the substrate surface. In an alternate embodiment, the supercritical solution containing at least one reagent is expanded to produce a vapor or aerosol which is then mixed with a gas containing at least one additional reagent. A chemical reaction is induced in the resulting mixture so that a film of the desired material is deposited.

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Journal ArticleDOI

Nanomaterials and supercritical fluids

TL;DR: A critical review of the supercritical based techniques applied to the production of nanoparticles, nanofibers, nanowires, nanotubes, and nanofilms can be found in this article.
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TL;DR: In this article, a method for forming particles of a substance, by co-introducing into a particle formation vessel, in which the temperature and pressure are controlled, of a supercritical fluid; a solution or suspension of the substance in a first vehicle; and a second vehicle which is both substantially miscible with the first vehicle and substantially soluble in the super-critical fluid, in such a way that dispersion of the solution and suspension and the second vehicle, and extraction of the vehicles, occur substantially simultaneously and substantially immediately on introduction of the fluids into the vessel, by the action
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TL;DR: In this article, methods and apparatuses for forming fine particles of a desired substance comprising dissolving said substance in a fluid such as water to form a solution and mixing the solution with a supercritical carbon dioxide which becomes a gas upon rapid pressure release, and with which the first fluid is at least partially immiscible, and releasing the pressure to form an air-borne dispersion or aerosol comprising particles having an average diameter between about 0.1 and about 6.5 μm.
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Methods for fine particle formation

TL;DR: In this paper, methods and apparatuses for forming fine particles of a desired substance comprising dissolving said substance in a fluid such as water to form a solution and mixing the solution with a supercritical carbon dioxide which becomes a gas upon rapid pressure release, and with which the first fluid is at least partially immiscible, and releasing the pressure to form an air-borne dispersion or aerosol comprising particles having an average diameter between about 0.1 and about 6.5 μm.
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References
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Patent

Supercritical fluid molecular spray film deposition and powder formation

TL;DR: In this article, a molecular spray is directed against a substrate to deposit a solid thin film thereon, or discharged into a collection chamber to collect a fine powder, and any clusters of solvent are broken up and vaporized and pumped away.
Patent

Liquid spray application of coatings with supercritical fluids as diluents and spraying from an orifice

TL;DR: In this article, a liquid coatings application process and apparatus is provided in which supercritical fluids such as supercritical carbon dioxide fluid, are used to reduce to application consistency viscous coatings compositions to allow for their application as liquid sprays.
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Monomolecular or very thin coating prodn. on porous material - by contact with supercritical gas contg. solid or liq. coating material in soln.

TL;DR: In this article, surface coating is applied by contacting the material (I) to be coated with a gas in the supercritical state as fluid medium, which contains the solid or liquid coating material (II) in soln.