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Patent

Device for automatic control of vacuum system suction pressures using variable frequency drive motors

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TLDR
In this paper, a valve regulator is connected to the vacuum system through a duct, and the vacuum in the regulator acts on a spring biased diaphragm to move an arm linked to a potentiometer.
Abstract
A valve regulator is connected to the vacuum system(b) through a duct(2). The vacuum in the regulator acts on a spring biased(12) diaphragm(8) to move an arm(13,14) linked to a potentiometer(d). The potentiometer is wired to a frequency converter(e) that supplies the drive motor(f) rotating the system vacuum pump.

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Patent

Vacuum pump system

TL;DR: In this paper, a microprocessor is used in conjunction with pressure and temperature sensors and motor control circuits to regulate the pressure by varying the speed of one or more vacuum pumps, which in turn adjusts the motor speed.
Patent

Diaphragm-type vacuum pump device

TL;DR: A diaphragm-type vacuum pump as discussed by the authors is a type of vacuum pump that includes a diaphram, a pumping chamber the volume of which is changed by reciprocating motion of the diaphrasm, and a check valve for drawing air into the pumping chamber, an orifice or relief valve disposed in the orifice to communicate with atmosphere.
Patent

Device for regulating vacuum.

TL;DR: In this article, a vacuum regulating device for apparatuses for measuring the low-temperature durability of a fuel containing paraffins, requiring a constant or time-varying pressure reduction, was described.