Patent
High-temperature (600 DEG C) pressure measurement passive wireless surface acoustic wave sensor
Chunguang Xu,Shiyuan Zhou,Yuntao Zhang,Jing Liu,Dingguo Xiao,Xinyu Zhao,Juan Hao,Fanwu Meng,Qinxue Pan +8 more
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TLDR
In this paper, a high-temperature (600 DEG C) pressure measurement passive wireless surface acoustic wave sensor is presented, which consists of a piezoelectric substrate material, an interdigital transducer, a reflecting grating, a small size antenna and a high temperature lead.Abstract:
The invention relates to a high-temperature (600 DEG C) pressure measurement passive wireless surface acoustic wave sensor. The passive wireless high-temperature pressure measurement sensor provided by the invention comprises a piezoelectric substrate material, an interdigital transducer, a reflecting grating, a small size antenna and a high-temperature lead, wherein a single-end surface acoustic wave resonator serves as the core of the high-temperature sensor; the lanthanum gallium silicate serves as the substrate; the interdigital transducer and the reflecting grating are deposited and arranged on the substrate; the surface acoustic wave is aroused and received by utilizing the piezoelectric effect and the inverse piezoelectric effect; the interdigital transducer receives an electromagnetic wave signal from a wireless inquiring unit through the antenna; the surface acoustic wave which is aroused from the surface of the substrate is spread towards two sides and is reflected by the reflecting grating; the reflected surface acoustic wave is reconverted to the electromagnetic wave signal through the interdigital transducer and is transmitted to the wireless inquiring unit through the antenna; and the pressure measurement at a high temperature is realized by using a signal processing method. The pressure sensor is provided with a pressure receiving diaphragm for sensing the pressure. The surface acoustic wave resonator is adhered to the pressure receiving diaphragm by using adhesives and is used for receiving the diaphragm deformation. The sensor has the advantages that the structure is simple, the volume is small, the weight is light, the precision is high, the sensor is wireless and passive, and the sensor is fit for the wireless remote monitoring for high-temperature environmental pressure in aerospace industry, petrochemical industry, nuclear industry, and the like.read more
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References
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Patent
Surface acoustic wave sensor with low loss and high temperature stability
TL;DR: In this article, the authors proposed a surface acoustic wave sensor with low loss and high temperature stability, which consists of a piezoelectric substrate, an input interdigital transducer and an output inter-digital transducers.